An optimized method to calculate error correction capability of tool influence function in frequency domain
文献类型：会议论文
| 作者 | Wang, Jia; Hou, Xi; Wan, Yongjian; Shi, Chunyan |
| 出版日期 | 2017 |
| 关键词 | Codes (symbols) - Error correction - Frequency domain analysis - Method of moments - Polishing - Power spectral density - Spectral density |
| 卷号 | 10448 |
| 页码 | 104481Z |
| 英文摘要 | An optimized method to calculate error correction capability of tool influence function (TIF) in certain polishing conditions will be proposed based on smoothing spectral function. The basic mathematical model for this method will be established in theory. A set of polishing experimental data with rigid conformal tool is used to validate the optimized method. The calculated results can quantitatively indicate error correction capability of TIF for different spatial frequency errors in certain polishing conditions. The comparative analysis with previous method shows that the optimized method is simpler in form and can get the same accuracy results with less calculating time in contrast to previous method. Copyright © 2017 SPIE. |
| 会议录 | 0277-786X
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| 语种 | 英语 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9035]  |
| 专题 | 光电技术研究所_先光中心 |
| 作者单位 | Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China |
| 推荐引用方式 GB/T 7714 | Wang, Jia,Hou, Xi,Wan, Yongjian,et al. An optimized method to calculate error correction capability of tool influence function in frequency domain[C]. 见:. |
入库方式： OAI收割
来源：光电技术研究所
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