A method of measuring the velocity of slit based on machine vision
文献类型：会议论文
| 作者 | Chen, Man1,2; Liao, Zhijie1 |
| 出版日期 | 2017 |
| 关键词 | Diaphragms - Error analysis |
| 卷号 | 10322 |
| 页码 | 103222U |
| 英文摘要 | In the lithography machine, there is a field diaphragm, which is a kind of edge structure. In the process of exposure, it is linearly synchronous movement with the die, so when developing the slit, it is necessary to measure its movement characteristics precisely. A method of velocity measurement based on machine vision is adopted, by detecting edge position in sequential images, and then through the transformation between image coordinate and world coordinate, the object displacement in real space is calculated and finally instantaneous velocity of the object is got. Firstly, through the simulation model in CODE V, correctness of the measurement principle is verified, Next, some error sources that affect the precision of the machine vision measurement system are analyzed, and corresponding solutions are given. © 2017 SPIE. |
| 会议录 | 0277-786X
 |
| 语种 | 英语 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9043]  |
| 专题 | 空天部 |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan; 610209, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China |
| 推荐引用方式 GB/T 7714 | Chen, Man,Liao, Zhijie. A method of measuring the velocity of slit based on machine vision[C]. 见:. |
入库方式： OAI收割
来源：光电技术研究所
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