Flexible thermistors: MCNO films with low resistivity and high TCR deposited on flexible organic sheets by RF magnetron sputtering
文献类型:会议论文
作者 | Wu J; Huang ZM; Jiang L; Gao YQ; Zhou W; Chu JH |
出版日期 | 2017 |
关键词 | Flexible thermistors Negative temperature coefficients infrared detection |
DOI | 10.1117/12.2273255 |
英文摘要 | Mn-Co-Ni-O (MCNO) flexible thermistors are fabricated on polyethylene terephthalate or polyimide sheets by RF magnetron sputtering method at room temperature. The whole fabricating processes is completed at room temperature. The temperature coefficient of resistance (TCR) is -3.1% and resistivity as low as 110 Omega cm at 295K. The bending-straightening cycle test indicates the flexible MCNO sheet is stable. The temperature sensing test shows the thermistors respond to temperature change rapidly and sensitively. Due to the heat-treat free process high TCR and moderate resistivity features the technique we provide here allows a convenient and low cost industrial manufacture of high performance flexible thermistors and wide band infrared detectors. |
语种 | 英语 |
源URL | [http://202.127.2.71:8080/handle/181331/12091] ![]() |
专题 | 上海技术物理研究所_上海技物所 |
作者单位 | Shanghai Inst Tech Phys |
推荐引用方式 GB/T 7714 | Wu J,Huang ZM,Jiang L,et al. Flexible thermistors: MCNO films with low resistivity and high TCR deposited on flexible organic sheets by RF magnetron sputtering[C]. 见:. |
入库方式: OAI收割
来源:上海技术物理研究所
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