中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Flexible thermistors: MCNO films with low resistivity and high TCR deposited on flexible organic sheets by RF magnetron sputtering

文献类型:会议论文

作者Wu J; Huang ZM; Jiang L; Gao YQ; Zhou W; Chu JH
出版日期2017
关键词Flexible thermistors Negative temperature coefficients infrared detection
DOI10.1117/12.2273255
英文摘要Mn-Co-Ni-O (MCNO) flexible thermistors are fabricated on polyethylene terephthalate or polyimide sheets by RF magnetron sputtering method at room temperature. The whole fabricating processes is completed at room temperature. The temperature coefficient of resistance (TCR) is -3.1% and resistivity as low as 110 Omega cm at 295K. The bending-straightening cycle test indicates the flexible MCNO sheet is stable. The temperature sensing test shows the thermistors respond to temperature change rapidly and sensitively. Due to the heat-treat free process high TCR and moderate resistivity features the technique we provide here allows a convenient and low cost industrial manufacture of high performance flexible thermistors and wide band infrared detectors.
语种英语
源URL[http://202.127.2.71:8080/handle/181331/12091]  
专题上海技术物理研究所_上海技物所
作者单位Shanghai Inst Tech Phys
推荐引用方式
GB/T 7714
Wu J,Huang ZM,Jiang L,et al. Flexible thermistors: MCNO films with low resistivity and high TCR deposited on flexible organic sheets by RF magnetron sputtering[C]. 见:.

入库方式: OAI收割

来源:上海技术物理研究所

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