Fabrication of Gold Microelectrodes on a Glass Substrate by Femtosecond-Laser-Assisted Electroless Plating
文献类型:期刊论文
作者 | Song, JX; Liao, Y; Liu, CN; Lin, D; Qiao, LL; Cheng, Y; Sugioka, K; Midorikawa, K; Zhang, S |
刊名 | JOURNAL OF LASER MICRO NANOENGINEERING
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出版日期 | 2012 |
卷号 | 7期号:3 |
英文摘要 | We present a simple method for fabrication of gold microelectrode by use of femtosecond laser modification combined with successive electroless gold plating. The fabrication procedures mainly include (1) femtosecond laser direct writing for generation of silver seeds, (2) electroless plating for selective growth of gold in areas modified by femtosecond laser irradiation, and (3) postannealing at 300 degrees C for 1 hr for improving adhesion. We find that for successfully achieving selective deposition of gold, the composition of plating solution needs to be carefully chosen and optimized. We demonstrate good electrical conductivity and excellently adhesion of the microelectrode. DOI:10.2961/jlmn.2012.03.0018 |
WOS记录号 | WOS:000311846500018 |
公开日期 | 2013-03-18 |
源URL | [http://202.127.1.142/handle/181331/6945] ![]() |
专题 | 上海技术物理研究所_上海技物所 |
推荐引用方式 GB/T 7714 | Song, JX,Liao, Y,Liu, CN,et al. Fabrication of Gold Microelectrodes on a Glass Substrate by Femtosecond-Laser-Assisted Electroless Plating[J]. JOURNAL OF LASER MICRO NANOENGINEERING,2012,7(3). |
APA | Song, JX.,Liao, Y.,Liu, CN.,Lin, D.,Qiao, LL.,...&Zhang, S.(2012).Fabrication of Gold Microelectrodes on a Glass Substrate by Femtosecond-Laser-Assisted Electroless Plating.JOURNAL OF LASER MICRO NANOENGINEERING,7(3). |
MLA | Song, JX,et al."Fabrication of Gold Microelectrodes on a Glass Substrate by Femtosecond-Laser-Assisted Electroless Plating".JOURNAL OF LASER MICRO NANOENGINEERING 7.3(2012). |
入库方式: OAI收割
来源:上海技术物理研究所
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