中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Fabrication of Gold Microelectrodes on a Glass Substrate by Femtosecond-Laser-Assisted Electroless Plating

文献类型:期刊论文

作者Song, JX; Liao, Y; Liu, CN; Lin, D; Qiao, LL; Cheng, Y; Sugioka, K; Midorikawa, K; Zhang, S
刊名JOURNAL OF LASER MICRO NANOENGINEERING
出版日期2012
卷号7期号:3
英文摘要We present a simple method for fabrication of gold microelectrode by use of femtosecond laser modification combined with successive electroless gold plating. The fabrication procedures mainly include (1) femtosecond laser direct writing for generation of silver seeds, (2) electroless plating for selective growth of gold in areas modified by femtosecond laser irradiation, and (3) postannealing at 300 degrees C for 1 hr for improving adhesion. We find that for successfully achieving selective deposition of gold, the composition of plating solution needs to be carefully chosen and optimized. We demonstrate good electrical conductivity and excellently adhesion of the microelectrode. DOI:10.2961/jlmn.2012.03.0018
WOS记录号WOS:000311846500018
公开日期2013-03-18
源URL[http://202.127.1.142/handle/181331/6945]  
专题上海技术物理研究所_上海技物所
推荐引用方式
GB/T 7714
Song, JX,Liao, Y,Liu, CN,et al. Fabrication of Gold Microelectrodes on a Glass Substrate by Femtosecond-Laser-Assisted Electroless Plating[J]. JOURNAL OF LASER MICRO NANOENGINEERING,2012,7(3).
APA Song, JX.,Liao, Y.,Liu, CN.,Lin, D.,Qiao, LL.,...&Zhang, S.(2012).Fabrication of Gold Microelectrodes on a Glass Substrate by Femtosecond-Laser-Assisted Electroless Plating.JOURNAL OF LASER MICRO NANOENGINEERING,7(3).
MLA Song, JX,et al."Fabrication of Gold Microelectrodes on a Glass Substrate by Femtosecond-Laser-Assisted Electroless Plating".JOURNAL OF LASER MICRO NANOENGINEERING 7.3(2012).

入库方式: OAI收割

来源:上海技术物理研究所

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