Terahertz reflection and visible light transmission of ITO films affected by annealing temperature and applied in metamaterial absorber
文献类型：期刊论文
| 作者 | Shi, Zaiying1; Song, Lixin1; Zhang, Tao1 |
| 刊名 | VACUUM
 |
| 出版日期 | 2018 |
| 卷号 | 149页码:12 |
| 关键词 | ITO films Sn2+ Terahertz Hagen-Rubens relation Metamaterial absorber |
| ISSN号 | 0042-207X |
| DOI | 10.1016/j.vacuum.2017.12.006 |
| 英文摘要 | The ITO film with visible light transparence, and high terahertz (THz) reflectivity is a promising material for the commercial and engineering applications in the THz field. This study investigates the terahertz optical performance and electrical properties of ITO films prepared by DC magnetron sputtering in the presence of oxygen at different annealing temperatures. By comparing the XPS spectra of ITO films before and after the annealing, the doping theory is employed to explain why and how the ratio of Sn4+/Sn2+ can be changed because of annealing, and it is concluded that Sn with low valence (Sn2+) can result in a lower visible transmission. In the THz region, the ITO film has high reflectance that observes the Hagen-Rubens (HR) relationship to some extent. According to the HR relation, the THz reflectance of the ITO film is mainly affected by the conductivity which can be controlled by adjusting the annealing temperature and the oxygen flow in the process of preparation. Applying the prepared ITO film with high THz reflectance into our proposed metamaterial absorber, the experimental result proves that the maximum absorptivity of 94.66%. can. be achieved at 4.26 THz. (C) 2017 Elsevier Ltd. All rights reserved. |
| 学科主题 | Materials Science, Multidisciplinary ; Physics, Applied |
| WOS记录号 | WOS:000425576100002 |
| 出版者 | PERGAMON-ELSEVIER SCIENCE LTD |
| 源URL | [http://ir.sic.ac.cn/handle/331005/24438]  |
| 专题 | 中国科学院上海硅酸盐研究所 |
| 作者单位 | 1.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 2.Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Coating Mat CAS, Shanghai 200050, Peoples R China |
| 推荐引用方式 GB/T 7714 | Shi, Zaiying,Song, Lixin,Zhang, Tao. Terahertz reflection and visible light transmission of ITO films affected by annealing temperature and applied in metamaterial absorber[J]. VACUUM,2018,149:12, 18. |
| APA | Shi, Zaiying,Song, Lixin,&Zhang, Tao.(2018).Terahertz reflection and visible light transmission of ITO films affected by annealing temperature and applied in metamaterial absorber.VACUUM,149,12. |
| MLA | Shi, Zaiying,et al."Terahertz reflection and visible light transmission of ITO films affected by annealing temperature and applied in metamaterial absorber".VACUUM 149(2018):12. |
入库方式： OAI收割
来源：上海硅酸盐研究所
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