Coating SiC on Zircaloy-4 by magnetron sputtering at room temperature
文献类型:期刊论文
作者 | Bao, Weichao3; Xue, Jiaxiang1; Liu, Ji-Xuan; Wang, Xingang; Gu, Yifeng3; Xu, Fangfang; Zhang, Guo-Jun |
刊名 | JOURNAL OF ALLOYS AND COMPOUNDS
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出版日期 | 2018 |
卷号 | 730页码:81 |
关键词 | Magnetron sputtering Nanocrystalline SiC coating on Zircaloy-4 Morphology of films Mechanical properties |
ISSN号 | 0925-8388 |
DOI | 10.1016/j.jallcom.2017.09.281 |
英文摘要 | Coating refractory ceramics onto alloys has been considered to be a feasible way to enhance the mechanical properties along with the corrosion and radiation resistance of the cladding materials. Here, we report a room-temperature magnetron sputtering method to deposit SiC films onto Zircaloy-4 substrate. By optimizing variety of processing parameters including target-substrate distance, sputtering power and deposition pressure, we finally obtained a dense SiC film with high values of hardness (25.61 GPa), elastic modulus (214.9 GPa) and critical load (8.24 N). Structural characterization indicates nano-crystalline (similar to 10 nm) structures of the SiC films, which is expected to show better radiation resistance than bulk SiC. Effects of processing parameters especially the deposition pressure on film microstructures and mechanical properties have been investigated in depth, which involve difference in energy of sputtering particles, nucleation and growth of grains, and stress states of the deposited films. (C) 2017 Elsevier B.V. All rights reserved. |
学科主题 | Chemistry, Physical ; Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering |
WOS记录号 | WOS:000414166200013 |
出版者 | ELSEVIER SCIENCE SA |
资助机构 | The present work was financially supported by the National Natural Science Foundation of China (51502322, 11575275, 51532009) ; Science and Technology Commission of Shanghai Municipality (16DZ2260603) ; and Shanghai Technical Platform for Testing and Characterization on Inorganic Materials (14DZ2292900). ; The present work was financially supported by the National Natural Science Foundation of China (51502322, 11575275, 51532009) ; Science and Technology Commission of Shanghai Municipality (16DZ2260603) ; and Shanghai Technical Platform for Testing and Characterization on Inorganic Materials (14DZ2292900). |
源URL | [http://ir.sic.ac.cn/handle/331005/24560] ![]() |
专题 | 中国科学院上海硅酸盐研究所 |
作者单位 | 1.Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China 2.China Nucl Power Technol Res Inst, Nucl Fuel Res & Dev Ctr, Shenzhen 518026, Peoples R China 3.Donghua Univ, Inst Funct Mat, State Key Lab Modificat Chem Fibers & Polymer Mat, Shanghai 201620, Peoples R China 4.Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
推荐引用方式 GB/T 7714 | Bao, Weichao,Xue, Jiaxiang,Liu, Ji-Xuan,et al. Coating SiC on Zircaloy-4 by magnetron sputtering at room temperature[J]. JOURNAL OF ALLOYS AND COMPOUNDS,2018,730:81, 87. |
APA | Bao, Weichao.,Xue, Jiaxiang.,Liu, Ji-Xuan.,Wang, Xingang.,Gu, Yifeng.,...&Zhang, Guo-Jun.(2018).Coating SiC on Zircaloy-4 by magnetron sputtering at room temperature.JOURNAL OF ALLOYS AND COMPOUNDS,730,81. |
MLA | Bao, Weichao,et al."Coating SiC on Zircaloy-4 by magnetron sputtering at room temperature".JOURNAL OF ALLOYS AND COMPOUNDS 730(2018):81. |
入库方式: OAI收割
来源:上海硅酸盐研究所
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