Composites of Li-Al-B-Si-O glass and β-Al2O3 for LTCC-silicon heterogeneous integration applications
文献类型：期刊论文
| 作者 | Chen, Guanyu1,2; Liu, Zhifu1; Ma, Mingsheng1; Zhang, Faqiang1; Li, Yongxiang1,3; Wen, Zhaoyin1,2; Wu, Xiangwei1 |
| 刊名 | Ceramics International
 |
| 出版日期 | 2018 |
| ISSN号 | 02728842 |
| DOI | 10.1016/j.ceramint.2018.08.130 |
| 英文摘要 | Composites of Li-Al-B-Si-O (LABS) glass and β-Al2O3 have been synthesized for low-temperature co-fired ceramics (LTCC) technology application. The main phase of sintered composites is Li2Al2Si3O10 and β-Al2O3 phase appears only when its content is higher than 35 wt%. The DC conductivities of sintered composites are all above 1 × 10−8 S/cm at the temperature of 473 K. The activation energies of alkali ions of different composites are all between the conductivity measured perpendicular and parallel to the c-axis of Eucryptite, which proves the ionic conductance of composites is associated with the main phase of Li2Al2Si3O10. The CTE of the composites increased with the increase of β-Al2O3. The CTE of 68 wt% LABS glass-32 wt% β-Al2O3 is 3.15 ppm/°C (25–300 °C), which matches that of silicon (3.2 ppm/°C, 25–300 °C) well. The results indicate that the composites of Li-Al-B-Si-O glass and β-Al2O3 can be a promising material for LTCC-silicon heterogeneous integration with anodic bonding technology. © 2018 Elsevier Ltd and Techna Group S.r.l. |
| 出版者 | Elsevier Ltd |
| 源URL | [http://ir.sic.ac.cn/handle/331005/25228]  |
| 专题 | 中国科学院上海硅酸盐研究所 |
| 作者单位 | 1.CAS Key Lab of Inorganic Functional Materials and Devices, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai; 200050, China; 2.University of Chinese Academy of Sciences, Beijing; 100034, China; 3.School of Engineering, RMIT University, Melbourne; VIC; 3000, Australia |
| 推荐引用方式 GB/T 7714 | Chen, Guanyu,Liu, Zhifu,Ma, Mingsheng,et al. Composites of Li-Al-B-Si-O glass and β-Al2O3 for LTCC-silicon heterogeneous integration applications[J]. Ceramics International,2018. |
| APA | Chen, Guanyu.,Liu, Zhifu.,Ma, Mingsheng.,Zhang, Faqiang.,Li, Yongxiang.,...&Wu, Xiangwei.(2018).Composites of Li-Al-B-Si-O glass and β-Al2O3 for LTCC-silicon heterogeneous integration applications.Ceramics International. |
| MLA | Chen, Guanyu,et al."Composites of Li-Al-B-Si-O glass and β-Al2O3 for LTCC-silicon heterogeneous integration applications".Ceramics International (2018). |
入库方式： OAI收割
来源：上海硅酸盐研究所
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