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Extrinsic fabry-perot cantilever accelerometer based on micromachined 45° angled fiber

文献类型：期刊论文

作者Liu, Bin1,2; Zhong, Zhi2; Lin, Jie1; Wang, Xing3; Liu, Lei2; Shan, Mingguang2; Jin, Peng1
刊名Journal of Lightwave Technology
出版日期2018
卷号36期号:11页码:2196-2203
ISSN号07338724
DOI10.1109/JLT.2017.2760901
英文摘要High-sensitivity extrinsic Fabry-Perot cantilever accelerometers were proposed and tested. Micromachined 45° angled fiber was adopted to form the cantilever to measure the acceleration. The Fabry-Perot cavity was formed by the sidewall of the fiber and the inner surface of commercial ceramic sleeves. The stepped cantilever fiber was fabricated by etching method to improve the sensitivity without enlarging the cantilever's length or adding extra proof-mass. Detailed theoretical analysis, simulation, and experimental results of the proposed accelerometers were given. The measured results were in good agreement with the simulated results. The proposed accelerometers show the advantages of high flexibility, simplicity, compactness, and low cost, which are expected to be applied in the field of miniaturized vector hydrophone and seismic monitoring. © 1983-2012 IEEE.
出版者Institute of Electrical and Electronics Engineers Inc.
源URL[http://ir.sic.ac.cn/handle/331005/25299]  
专题中国科学院上海硅酸盐研究所
作者单位1.Center of Ultra-Precision Optoelectronic Engineering, Harbin Institute of Technology, Harbin; 150080, China;
2.College of Information and Communication Engineering, Harbin Engineering University, Harbin; 150001, China;
3.Shanghai Aerospace Control Technology Institute, Shanghai; 201109, China
推荐引用方式
GB/T 7714		 Liu, Bin,Zhong, Zhi,Lin, Jie,et al. Extrinsic fabry-perot cantilever accelerometer based on micromachined 45° angled fiber[J]. Journal of Lightwave Technology,2018,36(11):2196-2203.
APA Liu, Bin.,Zhong, Zhi.,Lin, Jie.,Wang, Xing.,Liu, Lei.,...&Jin, Peng.(2018).Extrinsic fabry-perot cantilever accelerometer based on micromachined 45° angled fiber.Journal of Lightwave Technology,36(11),2196-2203.
MLA Liu, Bin,et al."Extrinsic fabry-perot cantilever accelerometer based on micromachined 45° angled fiber".Journal of Lightwave Technology 36.11(2018):2196-2203.

入库方式： OAI收割

来源：上海硅酸盐研究所

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