Self-Powered Force Sensor Based on Thinned Bulk PZT for Real-Time Cutaneous Activities Monitoring
文献类型：期刊论文
| 作者 | Yi, Zhiran; Yang, Hanjia; Tian, Yingwei; Dong, Xiaoxue; Liu, Jingquan; Yang, Bin |
| 刊名 | IEEE Electron Device Letters
 |
| 出版日期 | 2018 |
| 卷号 | 39期号:8页码:1226-1229 |
| ISSN号 | 07413106 |
| DOI | 10.1109/LED.2018.2846184 |
| 英文摘要 | In this letter, a piezoelectric force sensor based on thinned bulk PZT is proposed to monitor cutaneous activities in real time and recognize hand gestures. Bulk inorganic piezoelectric ceramic bonded with a thin metal foil is thinned down by a chemical mechanical polishing process due to its excellent electromechanical factor. More uniform strain distribution can be generated by the metal layer. A flexible plastic substrate is used to achieve good contact with the rough skin surface. The sensitivity of this sensor with ∼10 V/N is obviously improved compared with recently reported force sensors based on deposited PZT film. This multifunctional wearable force sensor is very significant for the application of intelligent and portable healthcare monitoring and man-machine interaction. © 2018 IEEE. |
| 出版者 | Institute of Electrical and Electronics Engineers Inc. |
| 源URL | [http://ir.sic.ac.cn/handle/331005/25319]  |
| 专题 | 中国科学院上海硅酸盐研究所 |
| 作者单位 | National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Microfabrication, Ministry of Education, Department of Micro/Nano Electronics, Shanghai Jiao Tong University, Shanghai; 200240, China |
| 推荐引用方式 GB/T 7714 | Yi, Zhiran,Yang, Hanjia,Tian, Yingwei,et al. Self-Powered Force Sensor Based on Thinned Bulk PZT for Real-Time Cutaneous Activities Monitoring[J]. IEEE Electron Device Letters,2018,39(8):1226-1229. |
| APA | Yi, Zhiran,Yang, Hanjia,Tian, Yingwei,Dong, Xiaoxue,Liu, Jingquan,&Yang, Bin.(2018).Self-Powered Force Sensor Based on Thinned Bulk PZT for Real-Time Cutaneous Activities Monitoring.IEEE Electron Device Letters,39(8),1226-1229. |
| MLA | Yi, Zhiran,et al."Self-Powered Force Sensor Based on Thinned Bulk PZT for Real-Time Cutaneous Activities Monitoring".IEEE Electron Device Letters 39.8(2018):1226-1229. |
入库方式： OAI收割
来源：上海硅酸盐研究所
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