Sputtered SnO2:NiO thin films on self-assembled Au nanoparticle arrays for MEMS compatible NO2 gas sensors
文献类型：期刊论文
| 作者 | Wang, Ying1,2; Liu, Chengyao1; Wang, Zhou1; Song, Zhiwei3; Zhou, Xinyuan1; Han, Ning1,2; Chen, Yunfa1,2 |
| 刊名 | SENSORS AND ACTUATORS B-CHEMICAL
 |
| 出版日期 | 2019 |
| 卷号 | 278页码:28-38 |
| 关键词 | Au/SnO2:NiO thin films Heterostructure Self-assembly NO2 gas detection Thermal annealing Fermi level |
| ISSN号 | 0925-4005 |
| DOI | 10.1016/j.snb.2018.09.074 |
| 英文摘要 | Here, heterostructured Au/SnO2:NiO thin films are fabricated by sputtering SnO2:NiO target onto the self-assembled Au nanoparticle (NPs, diameter similar to 9.5 nm) arrays and then activated by H-2 annealing. Compared with the SnO2 and SnO2:NiO thin film counterparts, the 20 nm thick Au/SnO2:NiO film shows the highest NO2 sensing performance after activated at optimized temperature of 500 degrees C, with high response of similar to 185 to 5 ppm NO2, low detection limit of similar to 50 ppb, high selectivity, good stability and also low sensor-to-sensor variation of < 15%. The gas sensing property enhancement could not only be attributed to catalytic role of the AuNPs, but also to the effective Schottky barrier and p-n junction formation between Au, SnO2 and NiO, which is verified by the relatively higher Fermi level of similar to 4.56 eV compared with those of 4.1-4.3 eV as measured by the ultraviolet photoelectron spectroscopy. Furthermore, this method is of generality to effectively enhance the electron transfer in other sensing materials like pure SnO2 and WO3, showing the promising potency of this MicroElectrical-Mechanical System (MEMS) compatible heterostucture fabrication method in wafer-scale gas sensor production with high sensitivity, selectivity and good consistency towards low concentration gas detection such as ppb-level NO2. |
| WOS关键词 | CORE-SHELL NANORODS ; SENSING PROPERTIES ; ROOM-TEMPERATURE ; PERFORMANCE ; NANOSTRUCTURES ; NANOCOMPOSITES ; FABRICATION ; NANOWIRES ; MICROSTRUCTURES ; HETEROJUNCTION |
| 资助项目 | National Key R&D Program of China[2016YFC0207100] ; Guangdong Innovative and Entrepreneurial Research Team Program[2014ZT05C146] ; Guangdong Innovative and Entrepreneurial Research Team Program[20150317025954531] ; State Key Laboratory of Multiphase Complex Systems[MPCS-2014-C-01] |
| WOS研究方向 | Chemistry ; Electrochemistry ; Instruments & Instrumentation |
| 语种 | 英语 |
| WOS记录号 | WOS:000447620900005 |
| 出版者 | ELSEVIER SCIENCE SA |
| 资助机构 | National Key R&D Program of China ; Guangdong Innovative and Entrepreneurial Research Team Program ; State Key Laboratory of Multiphase Complex Systems |
| 源URL | [http://ir.ipe.ac.cn/handle/122111/26264]  |
| 专题 | 中国科学院过程工程研究所 |
| 通讯作者 | Han, Ning; Chen, Yunfa |
| 作者单位 | 1.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China 2.Chinese Acad Sci, Inst Urban Environm, Ctr Excellence Reg Atmospher Environm, Xiamen 361021, Peoples R China 3.Chinese Acad Sci, Natl Ctr Nanosci & Technol, Beijing 100190, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Ying,Liu, Chengyao,Wang, Zhou,et al. Sputtered SnO2:NiO thin films on self-assembled Au nanoparticle arrays for MEMS compatible NO2 gas sensors[J]. SENSORS AND ACTUATORS B-CHEMICAL,2019,278:28-38. |
| APA | Wang, Ying.,Liu, Chengyao.,Wang, Zhou.,Song, Zhiwei.,Zhou, Xinyuan.,...&Chen, Yunfa.(2019).Sputtered SnO2:NiO thin films on self-assembled Au nanoparticle arrays for MEMS compatible NO2 gas sensors.SENSORS AND ACTUATORS B-CHEMICAL,278,28-38. |
| MLA | Wang, Ying,et al."Sputtered SnO2:NiO thin films on self-assembled Au nanoparticle arrays for MEMS compatible NO2 gas sensors".SENSORS AND ACTUATORS B-CHEMICAL 278(2019):28-38. |
入库方式： OAI收割
来源：过程工程研究所
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