Low temperature deposited Ag films exhibiting highly preferred orientations
文献类型:期刊论文
作者 | Hu M(胡明); Gao XM(高晓明); Sun JY(孙嘉奕); Sun JY(孙嘉奕); Liu WM(刘维民); Weng LJ(翁立军); Fu YL(伏彦龙) |
刊名 | Materials Letters |
出版日期 | 2018 |
卷号 | 213期号:0页码:178-180 |
ISSN号 | 0167-577X |
关键词 | Physical Vapour Deposition Crystal Structure Thin Films Low Temperature |
DOI | 10.1016/j.matlet.2017.11.074 |
英文摘要 | Due to the crystal anisotropy, highly oriented films normally exhibit unique properties and performances. In this paper, Ag films were deposited using arc ion plating (AIP) at different substrate temperatures, substrate bias voltages and Ar pressures, and the relationship between the preferred orientation and deposition parameter of the films was investigated. The results exhibited that the preferred orientation of Ag films was influenced significantly by the deposition parameter due to the competition between the surface- and strain-energy minimization, and so both Ag films that exhibited highly preferred orientations of (1 1 1) and (2 0 0), respectively, were obtained at the optimum conditions. The relatively low friction was observed from the Ag film with highly preferred orientations of (1 1 1) because the (1 1 1) plane was the slip plane of face-centred cubic crystals. |
学科主题 | 材料科学与物理化学 |
资助项目 | PVD润滑薄膜研究组 ; 空间润滑材料研究组 |
语种 | 英语 |
WOS记录号 | WOS:000419049300045 |
资助机构 | National Science Foundation of China [Grant No. 51575508] |
源URL | [http://210.77.64.217/handle/362003/22835] |
专题 | 兰州化学物理研究所_先进润滑与防护材料研究发展中心 兰州化学物理研究所_固体润滑国家重点实验室 |
通讯作者 | Sun JY(孙嘉奕) |
作者单位 | State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
推荐引用方式 GB/T 7714 | Hu M,Gao XM,Sun JY,et al. Low temperature deposited Ag films exhibiting highly preferred orientations[J]. Materials Letters,2018,213(0):178-180. |
APA | Hu M.,Gao XM.,Sun JY.,Sun JY.,Liu WM.,...&Fu YL.(2018).Low temperature deposited Ag films exhibiting highly preferred orientations.Materials Letters,213(0),178-180. |
MLA | Hu M,et al."Low temperature deposited Ag films exhibiting highly preferred orientations".Materials Letters 213.0(2018):178-180. |
入库方式: OAI收割
来源:兰州化学物理研究所
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