中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
A simple strategy to tailor the microstructure and wear-resistance of sputtered WS2 films

文献类型:期刊论文

作者Gao XM(高晓明); Xu SS(徐书生); Hu M(胡明); Sun JY(孙嘉奕); Weng LJ(翁立军); Liu WM(刘维民); Gao XM(高晓明)
刊名Materials Letters
出版日期2018
卷号216期号:0页码:179-181
ISSN号0167-577X
关键词Physical Vapour Deposition Thin Films Structural
DOI10.1016/j.matlet.2018.01.027
英文摘要

Sputtered WS2 films can be modified by adding some amount of hetero-elements to overcome the porous columnar microstructure and thereby to enhance the wear resistance. However, the recession of tribological properties of WS2-hetero-element composite films in low earth orbit environment would be a potential danger because most hetero-elements succumbed to oxidation by atomic oxygen. Herein, by altering deposition argon pressure to adjust the plasmas bombard function on growing WS2 film, the characteristic porous microstructure disappeared. At the optimization condition, the sputtered WS2 film exhibited a dense microstructure, high ratio of S to W, and thereby much better wear-resistance. However, the excessive bombardment would result in the prominent loss of S atoms in WS2 film and the deterioration of tribological properties.

学科主题材料科学与物理化学
资助项目PVD润滑薄膜研究组 ; 空间润滑材料研究组
语种英语
WOS记录号WOS:000424713000048
资助机构China National Natural Science Foundation (Grant Nos. 51575508 ; 51505465)
源URL[http://210.77.64.217/handle/362003/22854]  
专题兰州化学物理研究所_先进润滑与防护材料研究发展中心
兰州化学物理研究所_固体润滑国家重点实验室
通讯作者Gao XM(高晓明)
作者单位State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, PR China
推荐引用方式
GB/T 7714
Gao XM,Xu SS,Hu M,et al. A simple strategy to tailor the microstructure and wear-resistance of sputtered WS2 films[J]. Materials Letters,2018,216(0):179-181.
APA Gao XM.,Xu SS.,Hu M.,Sun JY.,Weng LJ.,...&Gao XM.(2018).A simple strategy to tailor the microstructure and wear-resistance of sputtered WS2 films.Materials Letters,216(0),179-181.
MLA Gao XM,et al."A simple strategy to tailor the microstructure and wear-resistance of sputtered WS2 films".Materials Letters 216.0(2018):179-181.

入库方式: OAI收割

来源:兰州化学物理研究所

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