Fullerene-like hydrogenated carbon films deposited by plasma enhanced chemical vapor deposition (PECVD) as compared with other methods can attain super-low friction and wear. But they often have bad adhesion to steel substrate and their structures are tailored by non-metal elements as F, N etc. In this work, we have prepared the films on steel balls by the combination of PECVD and plasma nitriding, among which iron nitride particles are sputtered and introduced in the films. The films have longer wear life and better adhesion to the steel substrate due to the N diffusion from iron nitride particles to the atom matrix of the ball.