Characteristics of Gas Flow Within a Micro Diffuser/Nozzle Pump
文献类型：期刊论文
| 作者 | Li XH ; Yu XM; Zhang DC; Cui HH(崔海航); Li T; Wang Y; Wang YY
|
| 刊名 | Chinese Physics Letters
 |
| 出版日期 | 2006 |
| 卷号 | 23期号:5页码:1230-1233 |
| 通讯作者邮箱 | yuxm@ime.pku.edu.cn |
| ISSN号 | 0256-307X |
| 通讯作者 | Yu, XM (reprint author), Peking Univ, Inst Microelect, Beijing 100871, Peoples R China. |
| 中文摘要 | 英文摘要: The gas flow characteristics for various shapes of micro diffuser/nozzles have been experimentally investigated. The micro diffuser/nozzles with the lengths of 70 mu m, 90 mu m, 125 mu m and the taper angles of 7 degrees, 10 degrees, 14 degrees are designed and fabricated based on silicon micromachining technology for optimizing and comparing. The flat-wall diffuser/nozzle is 40 mu m x 5 mu m in depth and width. An experimental setup is designed to measure the gas flow rates under controlled temperature and pressure condition. Optimized values for the taper angle and the length of the diffuser/nozzle are experimentally obtained. |
| 学科主题 | 力学 |
| 类目[WOS] | Physics, Multidisciplinary |
| 研究领域[WOS] | Physics |
| 关键词[WOS] | NEWTONIAN FLUID ; SEDIMENTATION ; SIMULATION |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000237551700046 |
| 公开日期 | 2007-06-15 ; 2007-12-05 ; 2009-06-23 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/17323]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Li XH,Yu XM,Zhang DC,et al. Characteristics of Gas Flow Within a Micro Diffuser/Nozzle Pump[J]. Chinese Physics Letters,2006,23(5):1230-1233. |
| APA | Li XH.,Yu XM.,Zhang DC.,崔海航.,Li T.,...&Wang YY.(2006).Characteristics of Gas Flow Within a Micro Diffuser/Nozzle Pump.Chinese Physics Letters,23(5),1230-1233. |
| MLA | Li XH,et al."Characteristics of Gas Flow Within a Micro Diffuser/Nozzle Pump".Chinese Physics Letters 23.5(2006):1230-1233. |
入库方式： OAI收割
来源：力学研究所
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