Static Study of Cantilever Beam stiction under Electrostatic Force Influence
文献类型：期刊论文
| 作者 | Zhang Y(张吟) ; Zhao YP(赵亚溥)
|
| 刊名 | Acta Mechanica Solida Sinica
 |
| 出版日期 | 2004 |
| 卷号 | 17期号:2页码:104-112 |
| ISSN号 | 0894-9166 |
| 通讯作者 | Zhang, Y (reprint author), Univ Connecticut, Dept Mech Engn, Storrs, CT 06268 USA. |
| 中文摘要 | The model and analysis of the cantilever beam adhesion problem under the action of electrostatic force are given. Owing to the nonlinearity of electrostatic force, the analytical solution for this kind of problem is not available. In this paper, a systematic method of generating polynomials which are the exact beamsolutions of the loads with different distributions is provided. The polynomials are used to approximate the beam displacement due to electrostatic force. The equilibrium equation offers an answer to how the beam deforms but no information about the unstuck length. The derivative of the functional with respect to the unstuck length offers such information. But to compute the functional it is necessary to know the beam deformation. So the problem is iteratively solved until the results are converged. Galerkin and Newton-Raphson methods are used to solve this nonlinear problem. The effects of dielectric layer thickness and electrostatic voltage on the cantilever beamstiction are studied.The method provided in this paper exhibits good convergence. For the adhesion problem of cantilever beam without electrostatic voltage, the analytical solution is available and is also exactly matched by the computational results given by the method presented in this paper. |
| 学科主题 | 力学 |
| 类目[WOS] | Materials Science, Multidisciplinary ; Mechanics |
| 研究领域[WOS] | Materials Science ; Mechanics |
| 关键词[WOS] | MEMS ; ADHESION ; RESONATORS ; ACTUATORS ; CONTACT ; MODEL |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000224279300002 |
| 公开日期 | 2007-06-15 ; 2007-12-05 ; 2009-06-23 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/17354]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Zhang Y,Zhao YP. Static Study of Cantilever Beam stiction under Electrostatic Force Influence[J]. Acta Mechanica Solida Sinica,2004,17(2):104-112. |
| APA | 张吟,&赵亚溥.(2004).Static Study of Cantilever Beam stiction under Electrostatic Force Influence.Acta Mechanica Solida Sinica,17(2),104-112. |
| MLA | 张吟,et al."Static Study of Cantilever Beam stiction under Electrostatic Force Influence".Acta Mechanica Solida Sinica 17.2(2004):104-112. |
入库方式： OAI收割
来源：力学研究所
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