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Chinese Academy of Sciences Institutional Repositories Grid
Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure

文献类型:期刊论文

作者Zhang Y(张吟); Zhao YP(赵亚溥); Cheng ZH
刊名JOURNAL OF PHYSICS D-APPLIED PHYSICS
出版日期2018-02-14
卷号51期号:6页码:65305
ISSN号0022-3727
关键词indentation inverse problem bilayer structure subsurface characterization
DOI10.1088/1361-6463/aaa55d
英文摘要The inverse problem of determining three parameters: the film thickness, the film and substrate Young's moduli of a film/substrate bilayer by indentation, is formulated and solved. The physical mechanism for the solvability of the inverse problem is that these three parameters have different impacts at different indentation depth. Their impacts are systematically studied, which also provides a different approach of finding the three parameters or refining their range. Compared with various atomic force microscopy based techniques of detecting subsurface structures, which have to deal with an extremely difficult or even an insurmountable inverse problem with the integral equation of dynamics, the inverse problem here formulated by statics is much more straightforward and simpler. Formulating and solving such an inverse problem can be of some help to the applications such as characterizing subsurface structures, the out-of-plane properties of two-dimensional (2D) materials and various bilayer structures.
分类号二类
URL标识查看原文
WOS关键词ATOMIC-FORCE MICROSCOPY ; ELASTIC-MODULUS ; THIN-FILM ; MECHANICAL-PROPERTIES ; ACOUSTIC MICROSCOPY ; CONTACT STIFFNESS ; NANOINDENTATION ; SUBSTRATE ; HARDNESS ; HETEROSTRUCTURES
WOS研究方向Physics, Applied
语种英语
WOS记录号WOS:000423306600001
资助机构National Natural Science Foundation of China (NSFC) [11372321, 11772335, 21203038] ; Ministry of Science and Technology (MOST) of China [2016YFA0200700]
源URL[http://dspace.imech.ac.cn/handle/311007/78518]  
专题力学研究所_非线性力学国家重点实验室
作者单位1.Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China
2.Univ Chinese Acad Sci, Sch Engn Sci, Beijing 100049, Peoples R China
3.Renmin Univ China, Dept Phys, Beijing 100872, Peoples R China
4.Renmin Univ China, Beijing Key Lab Optoelect Funct Mat & Micronano D, Beijing 100872, Peoples R China
推荐引用方式
GB/T 7714
Zhang Y,Zhao YP,Cheng ZH. Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS,2018,51(6):65305.
APA 张吟,赵亚溥,&Cheng ZH.(2018).Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure.JOURNAL OF PHYSICS D-APPLIED PHYSICS,51(6),65305.
MLA 张吟,et al."Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure".JOURNAL OF PHYSICS D-APPLIED PHYSICS 51.6(2018):65305.

入库方式: OAI收割

来源:力学研究所

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