Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure
文献类型:期刊论文
作者 | Zhang Y(张吟); Zhao YP(赵亚溥); Cheng ZH |
刊名 | JOURNAL OF PHYSICS D-APPLIED PHYSICS |
出版日期 | 2018-02-14 |
卷号 | 51期号:6页码:65305 |
ISSN号 | 0022-3727 |
关键词 | indentation inverse problem bilayer structure subsurface characterization |
DOI | 10.1088/1361-6463/aaa55d |
英文摘要 | The inverse problem of determining three parameters: the film thickness, the film and substrate Young's moduli of a film/substrate bilayer by indentation, is formulated and solved. The physical mechanism for the solvability of the inverse problem is that these three parameters have different impacts at different indentation depth. Their impacts are systematically studied, which also provides a different approach of finding the three parameters or refining their range. Compared with various atomic force microscopy based techniques of detecting subsurface structures, which have to deal with an extremely difficult or even an insurmountable inverse problem with the integral equation of dynamics, the inverse problem here formulated by statics is much more straightforward and simpler. Formulating and solving such an inverse problem can be of some help to the applications such as characterizing subsurface structures, the out-of-plane properties of two-dimensional (2D) materials and various bilayer structures. |
分类号 | 二类 |
URL标识 | 查看原文 |
WOS关键词 | ATOMIC-FORCE MICROSCOPY ; ELASTIC-MODULUS ; THIN-FILM ; MECHANICAL-PROPERTIES ; ACOUSTIC MICROSCOPY ; CONTACT STIFFNESS ; NANOINDENTATION ; SUBSTRATE ; HARDNESS ; HETEROSTRUCTURES |
WOS研究方向 | Physics, Applied |
语种 | 英语 |
WOS记录号 | WOS:000423306600001 |
资助机构 | National Natural Science Foundation of China (NSFC) [11372321, 11772335, 21203038] ; Ministry of Science and Technology (MOST) of China [2016YFA0200700] |
源URL | [http://dspace.imech.ac.cn/handle/311007/78518] |
专题 | 力学研究所_非线性力学国家重点实验室 |
作者单位 | 1.Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China 2.Univ Chinese Acad Sci, Sch Engn Sci, Beijing 100049, Peoples R China 3.Renmin Univ China, Dept Phys, Beijing 100872, Peoples R China 4.Renmin Univ China, Beijing Key Lab Optoelect Funct Mat & Micronano D, Beijing 100872, Peoples R China |
推荐引用方式 GB/T 7714 | Zhang Y,Zhao YP,Cheng ZH. Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS,2018,51(6):65305. |
APA | 张吟,赵亚溥,&Cheng ZH.(2018).Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure.JOURNAL OF PHYSICS D-APPLIED PHYSICS,51(6),65305. |
MLA | 张吟,et al."Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure".JOURNAL OF PHYSICS D-APPLIED PHYSICS 51.6(2018):65305. |
入库方式: OAI收割
来源:力学研究所
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