The effects of substrate temperature on the properties of diphasic nanocrystalline silicon thin films
文献类型：期刊论文
| 作者 | Hao HY ; Xing J ; Li WM ; Zeng XB ; Kong GL ; Liao XB |
| 刊名 | optoelectronics and advanced materials-rapid communications
 |
| 出版日期 | 2011 |
| 卷号 | 5期号:40545页码:112-115 |
| ISSN号 | 1842-6573 |
| 关键词 | Nanocrystalline silicon thin films Structure Photoelectrical properties Stability MICROCRYSTALLINE SILICON TRANSITION FILMS SOLAR-CELLS HYDROGEN |
| 通讯作者 | hao, hy, china. univ geosci, sch mat sci & technol, beijing 100083, peoples r china. huiyinghaol@cugb.edu.cn |
| 学科主题 | 半导体材料 |
| 资助信息 | open foundation of key laboratory of semiconductor materials science institute of semiconductors, chinese academy of sciences [klsms-0907]; science and technology foundation of china university of geosciences [200705] |
| 收录类别 | SCI |
| 公开日期 | 2011-07-06 |
| 附注 | a series of diphasic nanocrystalline silicon thin films was prepared by pecvd technique. the effects of substrate temperature on the properties of the films were investigated. the results show that crystalline volume fraction and grain size in the films increase with increasing t-s. the improved structures lead to higher mobility lifetime product and better stability. while the photosensitivity decreases due to the formation of a conductive percolation channel or the shift of femi-level in the diphasic films. in our case, the diphasic nanocrystalline silicon thin film deposited at 200 degrees c can gain both the fine photoelectrical properties and high stability. |
| 源URL | [http://ir.semi.ac.cn/handle/172111/21369]  |
| 专题 | 半导体研究所_中科院半导体材料科学重点实验室 |
| 推荐引用方式 GB/T 7714 | Hao HY,Xing J,Li WM,et al. The effects of substrate temperature on the properties of diphasic nanocrystalline silicon thin films[J]. optoelectronics and advanced materials-rapid communications,2011,5(40545):112-115. |
| APA | Hao HY,Xing J,Li WM,Zeng XB,Kong GL,&Liao XB.(2011).The effects of substrate temperature on the properties of diphasic nanocrystalline silicon thin films.optoelectronics and advanced materials-rapid communications,5(40545),112-115. |
| MLA | Hao HY,et al."The effects of substrate temperature on the properties of diphasic nanocrystalline silicon thin films".optoelectronics and advanced materials-rapid communications 5.40545(2011):112-115. |
入库方式： OAI收割
来源：半导体研究所
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