Silicon optical modulator with integrated grating couplers based on 0.18-mu m complementary metal oxide semiconductor technology
文献类型：期刊论文
| 作者 | Xu HH ; Li ZY ; Zhu Y ; Li YT ; Yu YD ; Yu JZ |
| 刊名 | optical engineering
 |
| 出版日期 | 2011 |
| 卷号 | 50期号:4页码:article no.44001 |
| ISSN号 | 0091-3286 |
| 关键词 | silicon photonics modulation grating coupler pre-emphasis MACH-ZEHNDER MODULATOR CARRIER-DEPLETION WAVE-GUIDES COMPACT |
| 通讯作者 | xu, hh, chinese acad sci, inst semicond, state key lab integrated optoelect, a35,qinghua e rd, beijing 100083, peoples r china. xu_haihua@semi.ac.cn |
| 学科主题 | 光电子学 |
| 资助信息 | national basic research program of china [2006cb302803]; national natural science foundation of china [60877036]; state key laboratory of advanced optical communication systems and networks, china [2008sh02]; institute of semiconductors, chinese academy of sciences [iscas2008t10] |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2011-07-05 ; 2011-07-15 |
| 附注 | a silicon p-i-n diode mach-zehnder optical modulator integrated with grating couplers is fabricated in 0.18-mu m complementary metal oxide semiconductor technology. the device has an ultracompact length of 200 mu m. high modulation efficiency with a figure of merit of v pi l = 0.22 v mm is demonstrated. a novel pre-emphasis technique is introduced to achieve high-speed modulation, and a data transmission rate of 3 gbps is present. (c) 2011 society of photo-optical instrumentation engineers (spie). [doi: 10.1117/1.3560264] |
| 源URL | [http://ir.semi.ac.cn/handle/172111/20963]  |
| 专题 | 半导体研究所_集成光电子学国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Xu HH,Li ZY,Zhu Y,et al. Silicon optical modulator with integrated grating couplers based on 0.18-mu m complementary metal oxide semiconductor technology[J]. optical engineering,2011,50(4):article no.44001. |
| APA | Xu HH,Li ZY,Zhu Y,Li YT,Yu YD,&Yu JZ.(2011).Silicon optical modulator with integrated grating couplers based on 0.18-mu m complementary metal oxide semiconductor technology.optical engineering,50(4),article no.44001. |
| MLA | Xu HH,et al."Silicon optical modulator with integrated grating couplers based on 0.18-mu m complementary metal oxide semiconductor technology".optical engineering 50.4(2011):article no.44001. |
入库方式： OAI收割
来源：半导体研究所
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