PHASE TRANSITION OF VANADIUM OXIDE FILMS ANNEALED WITH DIFFERENT METHODS
文献类型:期刊论文
作者 | Li GK![]() |
刊名 | journal of infrared and millimeter waves
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出版日期 | 2010 |
卷号 | 29期号:6页码:457-460 |
关键词 | vanadium dioxide thin film infrared transmission spectrum rapid elevating temperatue THIN-FILMS VO2 FILMS TEMPERATURE FABRICATION |
ISSN号 | 1001-9014 |
通讯作者 | liang, jr, tianjin univ, sch elect & informat engn, tianjin 300072, peoples r china. liang_jiran@tju.edu.cn |
学科主题 | 光电子学 |
收录类别 | SCI |
语种 | 中文 |
公开日期 | 2011-07-05 ; 2011-07-15 |
附注 | vanadium oxide thin films were deposited by dual ion beam sputtering, and then annealled with different procedures of temperature elevating. optical transmission properties were measured at different temperature by use of fourier transform infrared spectrum, from which the relationship of transmission and temperature at a fixed wavelength of 5 mu m was obtained. the results show that the vanadium oxide thin film annealed with rapid elevating temperature has smaller and uniform crystal size, while the film annealed with normal elevating temperature has larger and wider distributed crystal size. all the films after annealing have abrupt change over 60% in transmission in infrared band. the phase transition temperature of vanadium oxide thin film after rapid elevating temperature annealing is 63.74 degrees c, which is higher than that of vanadium oxide thin film after normal elevating temperature annealing, 60.31 degrees c. the temperature range of phase transition of the former is also broader. |
源URL | [http://ir.semi.ac.cn/handle/172111/21019] ![]() |
专题 | 半导体研究所_集成光电子学国家重点实验室 |
推荐引用方式 GB/T 7714 | Li GK. PHASE TRANSITION OF VANADIUM OXIDE FILMS ANNEALED WITH DIFFERENT METHODS[J]. journal of infrared and millimeter waves,2010,29(6):457-460. |
APA | Li GK.(2010).PHASE TRANSITION OF VANADIUM OXIDE FILMS ANNEALED WITH DIFFERENT METHODS.journal of infrared and millimeter waves,29(6),457-460. |
MLA | Li GK."PHASE TRANSITION OF VANADIUM OXIDE FILMS ANNEALED WITH DIFFERENT METHODS".journal of infrared and millimeter waves 29.6(2010):457-460. |
入库方式: OAI收割
来源:半导体研究所
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