以废弃电子级硅芯片回收高纯硅工艺的研究
文献类型：学位论文
| ; | |
| 作者 | 徐华毕 |
| 学位类别 | 硕士 |
| 答辩日期 | 2007-06-17 |
| 授予单位 | 中国科学院广州能源研究所 |
| 授予地点 | 广州能源研究所 |
| 导师 | 梁宗存 |
| 关键词 | 太阳能级硅材料 废弃电子级硅芯片 机械喷砂 化学腐蚀 |
| 其他题名 | STUDY ON THE TECHNOLOGY OF RECYCLING HIGH PURITY SILICON MATERIALS FROM WASTE ELECTRONIC GRADE SILICON CHIPS |
| 中文摘要 | In this thesis we put the emphasis on the reclaiming high purity silicon materials from waste electronic grade silicon chips which is collected from semiconductor industry, so as to meet the demand of solar grade silicon materials to a certain extent. We adopted sand blasting and acid etching in the recovering process of waste silicon chips. On the experiment we removed the impurity layers on the surface of the waster silicon chips and reclaimed the high purity silicon chips by sand-blasting method. In addition, the admixture of HF 、HNO3 and CH3COOH was used to etch the metal-intermingled layers on the surface of the waster silicon chips so that high purity silicon chips were reclaimed. We can identify that the two methods of sand-blasting and acid etching would be available in reclaiming high purity silicon materials from waste electronic grade silicon chips. Sand-blasting is suitable to reclaim silicon chips with large size, and acid-etching is suitable to reclaim silicon chips with small size or silicon grains. Of course, we can use the two methods together to reclaim high purity silicon materials with high efficiency and low cost. |
| 语种 | 中文 |
| 公开日期 | 2011-07-10 ; 2011-07-15 |
| 页码 | 60 |
| 源URL | [http://ir.giec.ac.cn/handle/344007/4043]  |
| 专题 | 中国科学院广州能源研究所 |
| 推荐引用方式 GB/T 7714 | 徐华毕. 以废弃电子级硅芯片回收高纯硅工艺的研究, STUDY ON THE TECHNOLOGY OF RECYCLING HIGH PURITY SILICON MATERIALS FROM WASTE ELECTRONIC GRADE SILICON CHIPS[D]. 广州能源研究所. 中国科学院广州能源研究所. 2007. |
入库方式： OAI收割
来源：广州能源研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。