ITO薄膜的溶胶-凝胶法制备与性能研究
文献类型：学位论文
| ; | |
| 作者 | 张英 |
| 学位类别 | 硕士 |
| 答辩日期 | 2008-06-02 |
| 授予单位 | 中国科学院广州能源研究所 |
| 授予地点 | 广州能源研究所 |
| 导师 | 徐刚 |
| 关键词 | 透明导电氧化物 溶胶-凝胶 透过率 表面电阻 |
| 其他题名 | The sol-gel preparation of ITO thin films and investigation of their performance |
| 中文摘要 | The transparent conductive films have some advantages such as high transmittance of light mostly in visible range, low resistivity and high mechanical and chemical stability. They have presented potential applications in various technical areas such as liquid crystal displays, transparent conducting electrodes, solar cells and so on. The most commonly used transparent conductive film is tin doped indium oxide (ITO) thin film by magnetron sputtering, but it is very expensive. Low cost ITO films were developed by sol-gel method in this paper. It includes: (1) The influences of organic ligands, including acetylacetone (AcAc) and diethanolamine (DEA), on the stability of the sols, have been investigated. It is indicated that a suitable amount of DEA is favorable to improve the sol’s stability at a certain doping concentration of tin ions, and helpful for the formation of the homogeneous thin films. (2) Gel-film transformation processes with different organic ligands were studied by TG-DSC and FTIR. It shows that films chelated with DEA had finished the gel-film transformation processes when heat treating temperature was higher than 409℃. So it is suitable for the formation of film on glass substrate. (3) Thin films with transmittance above 80% and sheet resistance about 400 Ohm were successfully fabricated. (4) ATO/ZnO core-shell nanoparticles were synthesized by precipitation method. Their photocatalysis property was studied. |
| 语种 | 中文 |
| 公开日期 | 2011-07-14 ; 2011-07-15 |
| 页码 | 54 |
| 源URL | [http://ir.giec.ac.cn/handle/344007/5788]  |
| 专题 | 中国科学院广州能源研究所 |
| 推荐引用方式 GB/T 7714 | 张英. ITO薄膜的溶胶-凝胶法制备与性能研究, The sol-gel preparation of ITO thin films and investigation of their performance[D]. 广州能源研究所. 中国科学院广州能源研究所. 2008. |
入库方式： OAI收割
来源：广州能源研究所
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