Multiform structures with silicon nanopillars by cesium chloride self-assembly and dry etching
文献类型：期刊论文
| 作者 | Liao, Yuan-xun; Liu, Jing; Wang, Bo; Yi, Fu-ting |
| 刊名 | Applied surface science
 |
| 出版日期 | 2011-10-01 |
| 卷号 | 257期号:24页码:10489-10493 |
| 关键词 | Silicon nanopillar Cesium chloride self-assembly Dry etching |
| ISSN号 | 0169-4332 |
| DOI | 10.1016/j.apsusc.2011.07.014 |
| 通讯作者 | Yi, fu-ting(yift@ihep.ac.cn) |
| 英文摘要 | We develop a novel method to fabricate multiform structures of si nanopillars (diameters >40 nm, aspect ratio > 10, coverage ratio > 35%) by dry etch with self-assembled cesium chloride ( cscl) nanoislands as mask. the pillars can cover structures of lateral size 1 mu m and unpolished si wafer, enabling uneven surface to be textured by nanopillars without complex process or expensive polishing. planar micropatterns and tridimensional localization of nanopillars have been easily realized, useful for integrating nanopillars to devices. by figuring out substrate influences, fast formation of cscl islands within 1 min has been achieved for the first time, making cscl process flow to be possibly controlled within 30 min. based on the deliquescence of salt, cscl self-assembly is simple, widely tunable and compatible, which endows the approaches great practical potential. (c) 2011 elsevier b.v. all rights reserved. |
| WOS关键词 | FABRICATION ; LITHOGRAPHY |
| WOS研究方向 | Chemistry ; Materials Science ; Physics |
| WOS类目 | Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| 语种 | 英语 |
| WOS记录号 | WOS:000295540800029 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2176078 |
| 专题 | 高能物理研究所 |
| 通讯作者 | Yi, Fu-ting |
| 作者单位 | Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Liao, Yuan-xun,Liu, Jing,Wang, Bo,et al. Multiform structures with silicon nanopillars by cesium chloride self-assembly and dry etching[J]. Applied surface science,2011,257(24):10489-10493. |
| APA | Liao, Yuan-xun,Liu, Jing,Wang, Bo,&Yi, Fu-ting.(2011).Multiform structures with silicon nanopillars by cesium chloride self-assembly and dry etching.Applied surface science,257(24),10489-10493. |
| MLA | Liao, Yuan-xun,et al."Multiform structures with silicon nanopillars by cesium chloride self-assembly and dry etching".Applied surface science 257.24(2011):10489-10493. |
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来源：高能物理研究所
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