中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Nanopillars on unpolished substrates and their application in large-area solar cells

文献类型:期刊论文

作者Liu, Jing1; Zhang, Xinshuai1,2; Sun, Gangjie1,2; Wang, Yuting1,2; Wang, Bo1; Zhang, Tianchong1; Yi, Futing1
刊名Journal of nanoscience and nanotechnology
出版日期2017-03-01
卷号17期号:3页码:2012-2018
ISSN号1533-4880
关键词Nanopillars Cscl self-assembly Unpolished substrates Commercial silicon based solar cell
DOI10.1166/jnn.2017.13009
通讯作者Liu, jing() ; Yi, futing()
英文摘要Random nanopillars are fabricated on unpolished commercial substrates by cesium chloride ( cscl) self-assembly lithography, and they are applied in commercial solar cells for the first time. the cscl nanoislands with average diameter ranging from 100 to 700 nm are fabricated on unpolished silicon surface. with the cscl nanoislands as masks, the nanopillars with average diameter from 50 to 600 nm and height from 100 nm to 1.5 mu m are fabricated by inductively coupled plasma ( icp) dry etching. this unpolished silicon wafer with nanopillars of 300 nm average diameter and 600 nm height has low reflection of less than 10% for wavelength ranging from 400 to 1000 nm, which is much lower than that without nanopillars. after a thin layer of 80 nm sinx is deposited on the top of nanopillars, the reflectance reduces to less than 5% in a broad wavelength range from 300 nm to 1000 nm and reaches the minimum of 1.2% around 500 nm. in addition, following the standard processes, we have successfully integrated the nanopillars into 125 mmx125 mm commercial silicon based solar cells, which achieving a final efficiency of 17.74% with a short circuit current of 5.54 a and an open circuit voltage of 621.0 mv.
WOS关键词SILICON ; FABRICATION ; NANOWIRES ; ARRAYS ; ANTIREFLECTION ; LITHOGRAPHY ; SURFACE ; GROWTH ; RESIST
WOS研究方向Chemistry ; Science & Technology - Other Topics ; Materials Science ; Physics
WOS类目Chemistry, Multidisciplinary ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter
语种英语
出版者AMER SCIENTIFIC PUBLISHERS
WOS记录号WOS:000397126500063
URI标识http://www.irgrid.ac.cn/handle/1471x/2176733
专题高能物理研究所
通讯作者Liu, Jing; Yi, Futing
作者单位1.Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China
2.Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式
GB/T 7714
Liu, Jing,Zhang, Xinshuai,Sun, Gangjie,et al. Nanopillars on unpolished substrates and their application in large-area solar cells[J]. Journal of nanoscience and nanotechnology,2017,17(3):2012-2018.
APA Liu, Jing.,Zhang, Xinshuai.,Sun, Gangjie.,Wang, Yuting.,Wang, Bo.,...&Yi, Futing.(2017).Nanopillars on unpolished substrates and their application in large-area solar cells.Journal of nanoscience and nanotechnology,17(3),2012-2018.
MLA Liu, Jing,et al."Nanopillars on unpolished substrates and their application in large-area solar cells".Journal of nanoscience and nanotechnology 17.3(2017):2012-2018.

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来源:高能物理研究所

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