Nanopillars on unpolished substrates and their application in large-area solar cells
文献类型:期刊论文
作者 | Liu, Jing1; Zhang, Xinshuai1,2; Sun, Gangjie1,2; Wang, Yuting1,2; Wang, Bo1; Zhang, Tianchong1; Yi, Futing1 |
刊名 | Journal of nanoscience and nanotechnology
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出版日期 | 2017-03-01 |
卷号 | 17期号:3页码:2012-2018 |
关键词 | Nanopillars Cscl self-assembly Unpolished substrates Commercial silicon based solar cell |
ISSN号 | 1533-4880 |
DOI | 10.1166/jnn.2017.13009 |
通讯作者 | Liu, jing() ; Yi, futing() |
英文摘要 | Random nanopillars are fabricated on unpolished commercial substrates by cesium chloride ( cscl) self-assembly lithography, and they are applied in commercial solar cells for the first time. the cscl nanoislands with average diameter ranging from 100 to 700 nm are fabricated on unpolished silicon surface. with the cscl nanoislands as masks, the nanopillars with average diameter from 50 to 600 nm and height from 100 nm to 1.5 mu m are fabricated by inductively coupled plasma ( icp) dry etching. this unpolished silicon wafer with nanopillars of 300 nm average diameter and 600 nm height has low reflection of less than 10% for wavelength ranging from 400 to 1000 nm, which is much lower than that without nanopillars. after a thin layer of 80 nm sinx is deposited on the top of nanopillars, the reflectance reduces to less than 5% in a broad wavelength range from 300 nm to 1000 nm and reaches the minimum of 1.2% around 500 nm. in addition, following the standard processes, we have successfully integrated the nanopillars into 125 mmx125 mm commercial silicon based solar cells, which achieving a final efficiency of 17.74% with a short circuit current of 5.54 a and an open circuit voltage of 621.0 mv. |
WOS关键词 | SILICON ; FABRICATION ; NANOWIRES ; ARRAYS ; ANTIREFLECTION ; LITHOGRAPHY ; SURFACE ; GROWTH ; RESIST |
WOS研究方向 | Chemistry ; Science & Technology - Other Topics ; Materials Science ; Physics |
WOS类目 | Chemistry, Multidisciplinary ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter |
语种 | 英语 |
WOS记录号 | WOS:000397126500063 |
出版者 | AMER SCIENTIFIC PUBLISHERS |
URI标识 | http://www.irgrid.ac.cn/handle/1471x/2176733 |
专题 | 高能物理研究所 |
通讯作者 | Liu, Jing; Yi, Futing |
作者单位 | 1.Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China 2.Chinese Acad Sci, Beijing 100049, Peoples R China |
推荐引用方式 GB/T 7714 | Liu, Jing,Zhang, Xinshuai,Sun, Gangjie,et al. Nanopillars on unpolished substrates and their application in large-area solar cells[J]. Journal of nanoscience and nanotechnology,2017,17(3):2012-2018. |
APA | Liu, Jing.,Zhang, Xinshuai.,Sun, Gangjie.,Wang, Yuting.,Wang, Bo.,...&Yi, Futing.(2017).Nanopillars on unpolished substrates and their application in large-area solar cells.Journal of nanoscience and nanotechnology,17(3),2012-2018. |
MLA | Liu, Jing,et al."Nanopillars on unpolished substrates and their application in large-area solar cells".Journal of nanoscience and nanotechnology 17.3(2017):2012-2018. |
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来源:高能物理研究所
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