Uniformity evaluation of lattice spacing of si-28 single crystals
文献类型:期刊论文
作者 | Waseda, Atsushi1; Fujimoto, Hiroyuki1; Zhang, Xiao Wei2; Kuramoto, Naoki1; Fujii, Kenichi1 |
刊名 | Ieee transactions on instrumentation and measurement
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出版日期 | 2017-06-01 |
卷号 | 66期号:6页码:1304-1308 |
关键词 | Avogadro constant Lattice comparator Lattice spacing Silicon single crystal |
ISSN号 | 0018-9456 |
DOI | 10.1109/tim.2016.2624838 |
通讯作者 | Waseda, atsushi(waseda.atsushi@aist.go.jp) |
英文摘要 | The uniformity of the lattice spacing of silicon crystals was evaluated by the self-referenced lattice comparator with a resolution of 3 x 10(-9). lattice strain measurements were performed for the sample 10.5 cut from si-28 ingot (avo28), which was used to determine the avogadro constant. the mapping results for samples 4.r1, xint, and 9.r1 performed in the previous works have also been re-evaluated. the 4.r1 in the seed side of the ingot and the xint in the middle of the ingot have small distribution of lattice spacing. the standard deviations of the lattice spacing distribution for the 4.r1 and xint were 4.8 x 10(-9) and 5.5 x 10(-9), respectively. in contrast, the 9.r1 and the 10.5 samples cut from the tail side of the ingot have a larger distribution of lattice spacing. these lattice spacing distributions in the ingot are consistent with the impurity distribution in the ingot. |
WOS关键词 | AVOGADRO CONSTANT ; COMPARATOR |
WOS研究方向 | Engineering ; Instruments & Instrumentation |
WOS类目 | Engineering, Electrical & Electronic ; Instruments & Instrumentation |
语种 | 英语 |
WOS记录号 | WOS:000401291100032 |
出版者 | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
URI标识 | http://www.irgrid.ac.cn/handle/1471x/2177372 |
专题 | 高能物理研究所 |
通讯作者 | Waseda, Atsushi |
作者单位 | 1.AIST, Natl Metrol Inst Japan, Tsukuba, Ibaraki 3058563, Japan 2.Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China |
推荐引用方式 GB/T 7714 | Waseda, Atsushi,Fujimoto, Hiroyuki,Zhang, Xiao Wei,et al. Uniformity evaluation of lattice spacing of si-28 single crystals[J]. Ieee transactions on instrumentation and measurement,2017,66(6):1304-1308. |
APA | Waseda, Atsushi,Fujimoto, Hiroyuki,Zhang, Xiao Wei,Kuramoto, Naoki,&Fujii, Kenichi.(2017).Uniformity evaluation of lattice spacing of si-28 single crystals.Ieee transactions on instrumentation and measurement,66(6),1304-1308. |
MLA | Waseda, Atsushi,et al."Uniformity evaluation of lattice spacing of si-28 single crystals".Ieee transactions on instrumentation and measurement 66.6(2017):1304-1308. |
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来源:高能物理研究所
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