Fabrication of absorption gratings with x-ray lithography for x-ray phase contrast imaging
文献类型：期刊论文
| 作者 | Wang, Bo1; Wang, Yu-Ting1,2; Yi, Fu-Ting1; Zhang, Tian-Chong1; liu, Jing1; Zhou, Yue1,2 |
| 刊名 | International journal of modern physics b
 |
| 出版日期 | 2018-05-20 |
| 卷号 | 32期号:13页码:8 |
| 关键词 | X-ray phase contrast imaging X-ray lithography High-aspect-ratio |
| ISSN号 | 0217-9792 |
| DOI | 10.1142/s0217979218501631 |
| 通讯作者 | Wang, bo(wangbo@ihep.ac.cn) |
| 英文摘要 | Grating-based x-ray phase contrast imaging is promising especially in the medical area. two or three gratings are involved in grating-based x-ray phase contrast imaging in which the absorption grating of high-aspect-ratio is the most important device and the fabrication process is a great challenge. the material with large atomic number z is used to fabricate the absorption grating for excellent absorption of x-ray, and au is usually used. the fabrication process, which involves x-ray lithography, development and gold electroplating, is described in this paper. the absorption gratings with 4 pm period and about 100 mu m height are fabricated and the high-aspect-ratio is 50. |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Applied ; Physics, Condensed Matter ; Physics, Mathematical |
| 语种 | 英语 |
| WOS记录号 | WOS:000431992000013 |
| 出版者 | WORLD SCIENTIFIC PUBL CO PTE LTD |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2177623 |
| 专题 | 高能物理研究所 |
| 通讯作者 | Wang, Bo |
| 作者单位 | 1.Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Bo,Wang, Yu-Ting,Yi, Fu-Ting,et al. Fabrication of absorption gratings with x-ray lithography for x-ray phase contrast imaging[J]. International journal of modern physics b,2018,32(13):8. |
| APA | Wang, Bo,Wang, Yu-Ting,Yi, Fu-Ting,Zhang, Tian-Chong,liu, Jing,&Zhou, Yue.(2018).Fabrication of absorption gratings with x-ray lithography for x-ray phase contrast imaging.International journal of modern physics b,32(13),8. |
| MLA | Wang, Bo,et al."Fabrication of absorption gratings with x-ray lithography for x-ray phase contrast imaging".International journal of modern physics b 32.13(2018):8. |
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来源：高能物理研究所
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