Study of multilayer structures by synchrotron-radiation with small-angle diffraction method
文献类型:期刊论文
作者 | WANG, J; CUI, MQ; XU, WX; HUANG, YY; WANG, DW; LIU, JF; XIAN, DC |
刊名 | High energy physics & nuclear physics-english edition
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出版日期 | 1993 |
卷号 | 17期号:4页码:311-319 |
ISSN号 | 0899-9996 |
通讯作者 | Wang, j() |
英文摘要 | Small angle diffraction on w/si multilayer fabricated by magnetron sputtering is carried out at the diffraction station of beijing synchrotron radiation facility (bsrf). we present the analysis on the periodicity of the multilayer, the thickness of one period and the combination and give a comparison with the fitting result. |
WOS研究方向 | Physics |
WOS类目 | Physics, Nuclear ; Physics, Particles & Fields |
语种 | 英语 |
WOS记录号 | WOS:A1993NV79500001 |
出版者 | ALLERTON PRESS INC |
URI标识 | http://www.irgrid.ac.cn/handle/1471x/2177667 |
专题 | 高能物理研究所 |
通讯作者 | WANG, J |
作者单位 | CHINESE ACAD SCI,INST HIGH ENERGY PHYS,BEIJING,PEOPLES R CHINA |
推荐引用方式 GB/T 7714 | WANG, J,CUI, MQ,XU, WX,et al. Study of multilayer structures by synchrotron-radiation with small-angle diffraction method[J]. High energy physics & nuclear physics-english edition,1993,17(4):311-319. |
APA | WANG, J.,CUI, MQ.,XU, WX.,HUANG, YY.,WANG, DW.,...&XIAN, DC.(1993).Study of multilayer structures by synchrotron-radiation with small-angle diffraction method.High energy physics & nuclear physics-english edition,17(4),311-319. |
MLA | WANG, J,et al."Study of multilayer structures by synchrotron-radiation with small-angle diffraction method".High energy physics & nuclear physics-english edition 17.4(1993):311-319. |
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来源:高能物理研究所
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