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Chinese Academy of Sciences Institutional Repositories Grid
Study of multilayer structures by synchrotron-radiation with small-angle diffraction method

文献类型:期刊论文

作者WANG, J; CUI, MQ; XU, WX; HUANG, YY; WANG, DW; LIU, JF; XIAN, DC
刊名High energy physics & nuclear physics-english edition
出版日期1993
卷号17期号:4页码:311-319
ISSN号0899-9996
通讯作者Wang, j()
英文摘要Small angle diffraction on w/si multilayer fabricated by magnetron sputtering is carried out at the diffraction station of beijing synchrotron radiation facility (bsrf). we present the analysis on the periodicity of the multilayer, the thickness of one period and the combination and give a comparison with the fitting result.
WOS研究方向Physics
WOS类目Physics, Nuclear ; Physics, Particles & Fields
语种英语
WOS记录号WOS:A1993NV79500001
出版者ALLERTON PRESS INC
URI标识http://www.irgrid.ac.cn/handle/1471x/2177667
专题高能物理研究所
通讯作者WANG, J
作者单位CHINESE ACAD SCI,INST HIGH ENERGY PHYS,BEIJING,PEOPLES R CHINA
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GB/T 7714
WANG, J,CUI, MQ,XU, WX,et al. Study of multilayer structures by synchrotron-radiation with small-angle diffraction method[J]. High energy physics & nuclear physics-english edition,1993,17(4):311-319.
APA WANG, J.,CUI, MQ.,XU, WX.,HUANG, YY.,WANG, DW.,...&XIAN, DC.(1993).Study of multilayer structures by synchrotron-radiation with small-angle diffraction method.High energy physics & nuclear physics-english edition,17(4),311-319.
MLA WANG, J,et al."Study of multilayer structures by synchrotron-radiation with small-angle diffraction method".High energy physics & nuclear physics-english edition 17.4(1993):311-319.

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来源:高能物理研究所

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