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Casimir Effect on the Pull-in Parameters of Nanometer Switches
文献类型：期刊论文
| 作者 | Lin WH(林文惠) ; Zhao YP(赵亚溥)
|
| 刊名 | Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems
 |
| 出版日期 | 2005 |
| 卷号 | 11期号:2-3页码:80-85 |
| 通讯作者邮箱 | yzhao@lnm.imech.ac.cn |
| 关键词 | MICROELECTROMECHANICAL SYSTEMS ELASTIC FILMS MEMS FORCE ACTUATORS STABILITY STICTION ADHESION MODEL |
| ISSN号 | 0946-7076 |
| 通讯作者 | Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100080, Peoples R China. |
| 中文摘要 | Casimir effect on the critical pull-in gap and pull-in voltage of nanoelectromechanical switches is studied. An approximate analytical expression of the critical pull-in gap with Casimir force is presented by the perturbation theory. The corresponding pull-in parameters are computed numerically, from which one can notice the nonlinear effect of Casimir force on the pull-in parameters. The detachment length has been presented, which increases with increasing thickness of the beam. |
| 学科主题 | 力学 |
| 类目[WOS] | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied |
| 研究领域[WOS] | Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics |
| 关键词[WOS] | MICROELECTROMECHANICAL SYSTEMS ; ELASTIC FILMS ; MEMS ; FORCE ; ACTUATORS ; STABILITY ; STICTION ; ADHESION ; MODEL |
| 收录类别 | SCI |
| 原文出处 | http://dx.doi.org/10.1007/s00542-004-0411-6 |
| 语种 | 英语 |
| WOS记录号 | WOS:000226664900002 |
| 公开日期 | 2007-06-15 ; 2007-12-05 ; 2009-06-23 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/17582]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Lin WH,Zhao YP. Casimir Effect on the Pull-in Parameters of Nanometer Switches[J]. Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,2005,11(2-3):80-85. |
| APA | Lin WH,&Zhao YP.(2005).Casimir Effect on the Pull-in Parameters of Nanometer Switches.Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,11(2-3),80-85. |
| MLA | Lin WH,et al."Casimir Effect on the Pull-in Parameters of Nanometer Switches".Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems 11.2-3(2005):80-85. |
入库方式： OAI收割
来源：力学研究所
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