Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics
文献类型:期刊论文
作者 | Liu, X.1,2,3; Li, Q.3; Sikora, A.3; Sentis, M.3; Uteza, O.3; Stoian, R.4; Zhao, W.1![]() |
刊名 | OPTICS EXPRESS
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出版日期 | 2019-03-04 |
卷号 | 27期号:5页码:6996–7008 |
ISSN号 | 1094-4087 |
DOI | 10.1364/OE.27.006996 |
产权排序 | 1 |
英文摘要 | In order to control the length of micro-channels ablated at the surface of dielectrics, we use annular filtering apertures for tailoring the depth of focus of micrometric Gaussian-Bessel beams. We identify experimentally and numerically the appropriate beam truncation that promotes a smooth axial distribution of intensity with a small elongation, suitable for processing micro-channels of small aspect ratio. Single-shot channel fabrication is demonstrated on the front surface of a fused silica sample, with sub-micron diameter, high-quality opening, and depth of few micrometers, using 1 ps low-energy (< 0.45 mu J) pulse. Finally, we realize 10 x 10 matrices of densely packed channels with aspect ratio similar to 5 and a spatial period down to 1.5 mu m, as a prospective demonstration of direct laser fabrication of 2D photonic-crystal structures. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement |
语种 | 英语 |
WOS记录号 | WOS:000460170000088 |
出版者 | OPTICAL SOC AMER |
源URL | [http://ir.opt.ac.cn/handle/181661/31318] ![]() |
专题 | 西安光学精密机械研究所_瞬态光学技术国家重点实验室 |
通讯作者 | Sanner, N. |
作者单位 | 1.Chinese Acad Sci, State Key Lab Transient Opt & Photon, Xian Inst Opt & Precis Mech, Xian 710119, Shaanxi, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.Aix Marseille Univ, CNRS, LP3 UMR 7341, F-13288 Marseille, France 4.Univ Jean Monnet, Univ Lyon, Labo Hubert Curien, UMR CNRS 5516, F-42000 St Etienne, France |
推荐引用方式 GB/T 7714 | Liu, X.,Li, Q.,Sikora, A.,et al. Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics[J]. OPTICS EXPRESS,2019,27(5):6996–7008. |
APA | Liu, X..,Li, Q..,Sikora, A..,Sentis, M..,Uteza, O..,...&Sanner, N..(2019).Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics.OPTICS EXPRESS,27(5),6996–7008. |
MLA | Liu, X.,et al."Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics".OPTICS EXPRESS 27.5(2019):6996–7008. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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