中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics

文献类型:期刊论文

作者Liu, X.1,2,3; Li, Q.3; Sikora, A.3; Sentis, M.3; Uteza, O.3; Stoian, R.4; Zhao, W.1; Cheng, G.1; Sanner, N.3
刊名OPTICS EXPRESS
出版日期2019-03-04
卷号27期号:5页码:6996–7008
ISSN号1094-4087
DOI10.1364/OE.27.006996
产权排序1
英文摘要

In order to control the length of micro-channels ablated at the surface of dielectrics, we use annular filtering apertures for tailoring the depth of focus of micrometric Gaussian-Bessel beams. We identify experimentally and numerically the appropriate beam truncation that promotes a smooth axial distribution of intensity with a small elongation, suitable for processing micro-channels of small aspect ratio. Single-shot channel fabrication is demonstrated on the front surface of a fused silica sample, with sub-micron diameter, high-quality opening, and depth of few micrometers, using 1 ps low-energy (< 0.45 mu J) pulse. Finally, we realize 10 x 10 matrices of densely packed channels with aspect ratio similar to 5 and a spatial period down to 1.5 mu m, as a prospective demonstration of direct laser fabrication of 2D photonic-crystal structures. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

语种英语
WOS记录号WOS:000460170000088
出版者OPTICAL SOC AMER
源URL[http://ir.opt.ac.cn/handle/181661/31318]  
专题西安光学精密机械研究所_瞬态光学技术国家重点实验室
通讯作者Sanner, N.
作者单位1.Chinese Acad Sci, State Key Lab Transient Opt & Photon, Xian Inst Opt & Precis Mech, Xian 710119, Shaanxi, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
3.Aix Marseille Univ, CNRS, LP3 UMR 7341, F-13288 Marseille, France
4.Univ Jean Monnet, Univ Lyon, Labo Hubert Curien, UMR CNRS 5516, F-42000 St Etienne, France
推荐引用方式
GB/T 7714
Liu, X.,Li, Q.,Sikora, A.,et al. Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics[J]. OPTICS EXPRESS,2019,27(5):6996–7008.
APA Liu, X..,Li, Q..,Sikora, A..,Sentis, M..,Uteza, O..,...&Sanner, N..(2019).Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics.OPTICS EXPRESS,27(5),6996–7008.
MLA Liu, X.,et al."Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics".OPTICS EXPRESS 27.5(2019):6996–7008.

入库方式: OAI收割

来源:西安光学精密机械研究所

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