Femtosecond Bessel beam is advantageous in high-quality glass cutting because of its resistance to diffraction. However, the sizes of the modified layer in the glass ablated by Bessel beam can be affected by many factors. In this study, an analytical model to predict the sizes(the depth and the maximum diameter) of modified layer in glass with femtosecond Bessel beam based on an axicon through an orthogonal experiment L16(44) was conducted. The coefficient values of four factors are obtained through the Matlab multiple linear regression function based on the experimental data. Simultaneously, the significance of the regression equation was tested by using the F-value test and the verification test. It found that the experimental results are consistent with the theoretical results. The combined processing parameters with the largest aspect ratio are determined through the range analysis and the influence of the various factors on the sizes was obtained. Finally, an application of thin glass cutting by the internal modification and breaking process is demonstrated. The glass is well cut with the chipping on the breaking edge © 2019 Elsevier GmbH