An ABB IRB6640 industrial robot is used as a processing platform for optical polishing. The relationships of coordinate systems are defined, the algorithm of coordinate transformation, Euler angles and quaternion are provided. M-like removal function and Gaussian-like removal function are used to simulation process an off-Axis aspheric surface. The surface error after polishing by M-like removal function is 1.5 to 2.5 times bigger than Gaussian-like removal function. This proves that M-like removal function also has good convergence speed. Then, the pentagram polishing head is used to polish a Φ600mm off-Axis paraboloid surface. After 15 cycles, about 120 hours processing, PV converges from 5.8μm to 0.836μm, RMS converges from 1.2μm to 0.054μm, PV and RMS respectively converge 85% and 95%. The experiment shows M-like removal function has good convergence speed. © 2019 COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.