Broadband antireflection coating for the near-infrared InAs/GaSb Type-II superlattices photodetectors by lift-off process
文献类型:会议论文
作者 | Jia, Qing-Xuan1,2; Guo, Chun-Yan3,4; Sun, Yao-Yao1,2; Yang, Cheng-Ao1,2; Lv, Yue-Xi1,2; Jiang, Zhi1,2; Zheng, Da-Nong1,2; Han, Xi1,2; Jiang, Dong-Wei1,2; Wang, Guo-Wei1,2 |
出版日期 | 2018 |
会议日期 | 2018-10-12 |
会议地点 | Beijing, China |
卷号 | 10826 |
DOI | 10.1117/12.2509181 |
英文摘要 | Near-infrared InAs/GaSb Type-II superlattices is widely used in biomimetics, sensing, color-imaging technology and other applications. An antireflection coating(AR coating) can help it perform better, making the infrared photodetector a higher responstivity and also a higher quantum efficiency. We produce a broadband AR coating by plasma-enhanced chemical vapor deposition(PECVD) then using the lift-off technology making no damage without any change in the usual Infrared detector process flow, a 260 nm SiO2 AR coating is transform onto the surface of the infrared photodetector. After using the AR coating, the antireflection can provide up to 40% light gain, while the average reflectivity of the surface of InAs/GaSb type-II superlattice is decreased from 33% to 14%. The responsitivity is increased obviously. © 2018 SPIE. |
产权排序 | 3 |
会议录 | Infrared, Millimeter-Wave, and Terahertz Technologies V
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会议录出版者 | SPIE |
语种 | 英语 |
ISSN号 | 0277786X;1996764X |
ISBN号 | 9781510622500 |
源URL | [http://ir.opt.ac.cn/handle/181661/31122] ![]() |
专题 | 条纹相机工程中心 |
通讯作者 | Niu, Zhi-Chuan |
作者单位 | 1.State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China; 2.College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing; 100049, China; 3.Key Laboratory of Ultra-fast Photoelectric Diagnostics Technology of Chinese Academy of Science, Xi'An Institute of Optics and Precision Mechanics, Xi'an; 710119, China; 4.Xi'An Jiaotong University, Xi'an; 710049, China |
推荐引用方式 GB/T 7714 | Jia, Qing-Xuan,Guo, Chun-Yan,Sun, Yao-Yao,et al. Broadband antireflection coating for the near-infrared InAs/GaSb Type-II superlattices photodetectors by lift-off process[C]. 见:. Beijing, China. 2018-10-12. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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