中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Broadband antireflection coating for the near-infrared InAs/GaSb Type-II superlattices photodetectors by lift-off process

文献类型:会议论文

作者Jia, Qing-Xuan1,2; Guo, Chun-Yan3,4; Sun, Yao-Yao1,2; Yang, Cheng-Ao1,2; Lv, Yue-Xi1,2; Jiang, Zhi1,2; Zheng, Da-Nong1,2; Han, Xi1,2; Jiang, Dong-Wei1,2; Wang, Guo-Wei1,2
出版日期2018
会议日期2018-10-12
会议地点Beijing, China
卷号10826
DOI10.1117/12.2509181
英文摘要

Near-infrared InAs/GaSb Type-II superlattices is widely used in biomimetics, sensing, color-imaging technology and other applications. An antireflection coating(AR coating) can help it perform better, making the infrared photodetector a higher responstivity and also a higher quantum efficiency. We produce a broadband AR coating by plasma-enhanced chemical vapor deposition(PECVD) then using the lift-off technology making no damage without any change in the usual Infrared detector process flow, a 260 nm SiO2 AR coating is transform onto the surface of the infrared photodetector. After using the AR coating, the antireflection can provide up to 40% light gain, while the average reflectivity of the surface of InAs/GaSb type-II superlattice is decreased from 33% to 14%. The responsitivity is increased obviously. © 2018 SPIE.

产权排序3
会议录Infrared, Millimeter-Wave, and Terahertz Technologies V
会议录出版者SPIE
语种英语
ISSN号0277786X;1996764X
ISBN号9781510622500
源URL[http://ir.opt.ac.cn/handle/181661/31122]  
专题条纹相机工程中心
通讯作者Niu, Zhi-Chuan
作者单位1.State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing; 100083, China;
2.College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing; 100049, China;
3.Key Laboratory of Ultra-fast Photoelectric Diagnostics Technology of Chinese Academy of Science, Xi'An Institute of Optics and Precision Mechanics, Xi'an; 710119, China;
4.Xi'An Jiaotong University, Xi'an; 710049, China
推荐引用方式
GB/T 7714
Jia, Qing-Xuan,Guo, Chun-Yan,Sun, Yao-Yao,et al. Broadband antireflection coating for the near-infrared InAs/GaSb Type-II superlattices photodetectors by lift-off process[C]. 见:. Beijing, China. 2018-10-12.

入库方式: OAI收割

来源:西安光学精密机械研究所

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