Super-resolution GaAs nano-structures fabricated by laser direct writing
文献类型：期刊论文
| 作者 | Liu, Qian; Zhang, Wei(张伟); Shi, Zhenwu; Chen, Chen; Yang, Xinning; Yang, Linyun; Zeng, Zhongming(曾中明) ; Zhang, Baoshun(张宝顺)
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| 刊名 | MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
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| 出版日期 | 2018 |
| 其他题名 | Super-resolution GaAs nano-structures fabricated by laser direct writing |
| 语种 | 英语 |
| 源URL | [http://ir.sinano.ac.cn/handle/332007/6186]  |
| 专题 | 苏州纳米技术与纳米仿生研究所_纳米加工公共平台 |
| 作者单位 | 中国科学院苏州纳米技术与纳米仿生研究所 |
| 推荐引用方式 GB/T 7714 | Liu, Qian,Zhang, Wei,Shi, Zhenwu,et al. Super-resolution GaAs nano-structures fabricated by laser direct writing[J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,2018. |
| APA | Liu, Qian.,Zhang, Wei.,Shi, Zhenwu.,Chen, Chen.,Yang, Xinning.,...&Zhang, Baoshun.(2018).Super-resolution GaAs nano-structures fabricated by laser direct writing.MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING. |
| MLA | Liu, Qian,et al."Super-resolution GaAs nano-structures fabricated by laser direct writing".MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING (2018). |
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