Novel adamantane-based periodic mesoporous organosilica film with ultralow dielectric constant and high mechanical strength.
文献类型：期刊论文
| 作者 | Zhang, Guoping; Zhang, Jiawei; Niu, Fangfang; Zhang, Fan; Zhao, Songfang; Wang, Mingliang; Gao, Yongju; Sun, Rong; Wong, Chingping |
| 刊名 | JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY
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| 出版日期 | 2018 |
| 文献子类 | 期刊论文 |
| 英文摘要 | In this work, a novel bridged organosilane precursor, adamantane-bridged organosilane (ADBO), was synthesized successfully which was employed to prepare adamantane-based (ADH-based) periodic mesoporous organosilica (PMO) thin film in the presence of porogen and acid catalyst via evaporation-induced self-assembly (EISA) after spin-coating procedure. The resultant ADH-based PMO thin films were characterized by FTIR, NMR, TEM, and small-angle XRD. The ADH-based PMO thin film with weight ratio of porogen to ADBO (0.75:1) possesses low dielectric constant (1.55 +/- 0.04@1 MHz), excellent Young's modulus (6.69 +/- 0.54 GPa), and ideal hydrophobic property (90.2A degrees of water contact angle) simultaneously. These outstanding properties of ADH-based PMO film can be ascribed to lower polarity, lower density, and rigid cavity structure of adamantane, which suggests its potential application as high-performance low-kappa material in next-generation microelectronics. |
| URL标识 | 查看原文 |
| 语种 | 英语 |
| 源URL | [http://ir.siat.ac.cn:8080/handle/172644/13609]  |
| 专题 | 深圳先进技术研究院_集成所 |
| 推荐引用方式 GB/T 7714 | Zhang, Guoping,Zhang, Jiawei,Niu, Fangfang,et al. Novel adamantane-based periodic mesoporous organosilica film with ultralow dielectric constant and high mechanical strength.[J]. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY,2018. |
| APA | Zhang, Guoping.,Zhang, Jiawei.,Niu, Fangfang.,Zhang, Fan.,Zhao, Songfang.,...&Wong, Chingping.(2018).Novel adamantane-based periodic mesoporous organosilica film with ultralow dielectric constant and high mechanical strength..JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY. |
| MLA | Zhang, Guoping,et al."Novel adamantane-based periodic mesoporous organosilica film with ultralow dielectric constant and high mechanical strength.".JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY (2018). |
入库方式： OAI收割
来源：深圳先进技术研究院
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