Fabrication of Electromagnetically-Driven Tilted Microcoil on Polyimide Capillary Surface for Potential Single-Fiber Endoscope Scanner Application.
文献类型：期刊论文
| 作者 | Sun, Bin; Sawada, Renshi; Ding, Guifu; Yang, Zhuoqing; Shi, Jianhao; Yao, Jinyuan |
| 刊名 | MICROMACHINES
 |
| 出版日期 | 2018 |
| 文献子类 | 期刊论文 |
| 英文摘要 | The design and fabrication of a Micro-electromechanical Systems (MEMS)-based tilted microcoil on a polyimide capillary are reported in this paper, proposed for an electromagnetically-driven single-fiber endoscope scanner application. The parameters of the tilted microcoil were optimized by simulation. It is proved that the largest driving force could be achieved when the tilt-angle, the pitch and the coil turns of the designed microcoil were 60 degrees, 80 mu m and 20, respectively. The modal simulation of the designed fiber scanner was carried out. The prototypes of the tilted microcoils were fabricated on the surface of polyimide capillary with 1 mm-diameter using our developed cylindrical projection lithography system. The dimensions of the two tiltedmicrocoils were as follows: one was tilt-angle 45 degrees, line width 10 +/- 0.2 mu m, coil pitch 78.5 +/- 0.5 mu m, and the other was tilt-angle 60 degrees, line width 10 +/- 0.2 mu m, coil pitch 81.5 +/- 0.5 mu m. Finally, a direct mask-less electroplating process was employed to fabricate the copper microcoil with 15 mu m thickness on the gold (Au) seed-layer, and the corresponding line width was expanded to 40 mu m. |
| URL标识 | 查看原文 |
| 语种 | 英语 |
| 源URL | [http://ir.siat.ac.cn:8080/handle/172644/14437]  |
| 专题 | 深圳先进技术研究院_医工所 |
| 推荐引用方式 GB/T 7714 | Sun, Bin,Sawada, Renshi,Ding, Guifu,et al. Fabrication of Electromagnetically-Driven Tilted Microcoil on Polyimide Capillary Surface for Potential Single-Fiber Endoscope Scanner Application.[J]. MICROMACHINES,2018. |
| APA | Sun, Bin,Sawada, Renshi,Ding, Guifu,Yang, Zhuoqing,Shi, Jianhao,&Yao, Jinyuan.(2018).Fabrication of Electromagnetically-Driven Tilted Microcoil on Polyimide Capillary Surface for Potential Single-Fiber Endoscope Scanner Application..MICROMACHINES. |
| MLA | Sun, Bin,et al."Fabrication of Electromagnetically-Driven Tilted Microcoil on Polyimide Capillary Surface for Potential Single-Fiber Endoscope Scanner Application.".MICROMACHINES (2018). |
入库方式： OAI收割
来源：深圳先进技术研究院
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