Design and fabrication of an integrated curved grating microspectrometer
文献类型：会议论文
| 作者 | Hongtao Feng; Guodong Zhang; Weiliang Shu; Baoyue Zhang; Hui Lin; Yan Chen |
| 出版日期 | 2018 |
| 会议日期 | 2018 |
| 会议地点 | 上海 |
| 英文摘要 | We demonstrated a curved grating micro-spectrometer integrated in microfluidic chip to distinguish excitation light and different fluorescence emission without filters. Recently, compact optical spectrometers attracted extensive interests in biomedical and scientific applications, for low production cost and compact component size. It is difficult to fabricated nanometer-grating as key component of micro-spectrometer. Traditionally, several approaches such as EB writing and UV lithography have been adopted for the fabrication of nanograting and lens. However, the existing methods were limited by high cost of EB writing and the low resolution of UV lithography. Here we developed a simple, high resolution and low-cost nanoimprint technology to achieve a curved grating on lens as mold. Through rapid and high resolution replication by UV Curing, the low cost lens with grating was integrated in microfluidic chip for spectral detection, so cost-effective mass production and disposable of chip become possible. |
| 源URL | [http://ir.siat.ac.cn:8080/handle/172644/14519]  |
| 专题 | 深圳先进技术研究院_医工所 |
| 推荐引用方式 GB/T 7714 | Hongtao Feng,Guodong Zhang,Weiliang Shu,et al. Design and fabrication of an integrated curved grating microspectrometer[C]. 见:. 上海. 2018. |
入库方式： OAI收割
来源：深圳先进技术研究院
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。