Nanopillar array with a λ/11 diameter fabricated by a kind of visible cw laser direct lithography system
文献类型：期刊论文
| 作者 | Zhang,Chen1,2; Wang,Kaige1; Bai,Jintao1; Wang,Shuang1; Zhao,Wei2; Yang,Fang2; Gu,Changzhi3; Wang,Guiren2,4,5 |
| 刊名 | Nanoscale research letters
 |
| 出版日期 | 2013-06-11 |
| 卷号 | 8期号:1 |
| 关键词 | Nanopillar Diffraction limit Lithography Coma Astigmatism |
| ISSN号 | 1556-276X |
| DOI | 10.1186/1556-276x-8-280 |
| 通讯作者 | Wang,kaige(wangkg@nwu.edu.cn) ; Wang,guiren(wanggu@cec.sc.edu) |
| 英文摘要 | Abstractnanoscale functional structures are indispensable elements in many fields of modern science. in this paper, nanopillar array with a pillar diameter far smaller than abbe's diffraction limit is realized by a new kind of continuous wave (cw) laser direct lithography technology. with atomic force microscopy technology, the average diameter of nanopillars on thin oir906 photoresist film is about 65 nm and the smallest diameter is 48 nm, which is about 1/11 of the incident laser wavelength. also, the influences of coma and astigmatism effects to the shape and size of nanopillar are numerically simulated by utilizing vector integral. as far as we know, it is the first time that nanopillar array is implemented by a donut-shaped 532-nm visible cw laser. the study presents a new, simple, inexpensive, and effective approach for nanopillar/pore array fabrication. |
| 语种 | 英语 |
| WOS记录号 | BMC:10.1186/1556-276X-8-280 |
| 出版者 | Springer New York |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2373543 |
| 专题 | 物理研究所 |
| 通讯作者 | Wang,Kaige; Wang,Guiren |
| 作者单位 | 1.Northwest University; Institute of Photonics and Photo-technology, International Scientific and Technological Cooperation Base of Photoelectric Technology and Functional Materials and Application 2.University of South Carolina; Department of Mechanical Engineering 3.Chinese Academy of Sciences; Institute of Physics 4.Northwest University; Department of Physics 5.University of South Carolina; Department of Biomedical Engineering Program |
| 推荐引用方式 GB/T 7714 | Zhang,Chen,Wang,Kaige,Bai,Jintao,et al. Nanopillar array with a λ/11 diameter fabricated by a kind of visible cw laser direct lithography system[J]. Nanoscale research letters,2013,8(1). |
| APA | Zhang,Chen.,Wang,Kaige.,Bai,Jintao.,Wang,Shuang.,Zhao,Wei.,...&Wang,Guiren.(2013).Nanopillar array with a λ/11 diameter fabricated by a kind of visible cw laser direct lithography system.Nanoscale research letters,8(1). |
| MLA | Zhang,Chen,et al."Nanopillar array with a λ/11 diameter fabricated by a kind of visible cw laser direct lithography system".Nanoscale research letters 8.1(2013). |
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来源：物理研究所
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