Resonance spectrum characteristics of effective electromechanical coupling coefficient of high-overtone bulk acoustic resonator
文献类型：期刊论文
| 作者 | Li, Jian1,2; Liu, Mengwei1; Wang, Chenghao1 |
| 刊名 | Micromachines
 |
| 出版日期 | 2016-09-01 |
| 卷号 | 7期号:9页码:11 |
| 关键词 | High-overtone bulk acoustic resonator Effective electromechanical coupling coefficient Resonance spectrum |
| ISSN号 | 2072-666X |
| DOI | 10.3390/mi7090159 |
| 通讯作者 | Liu, mengwei(liumw@mail.ioa.ac.cn) ; Wang, chenghao(chwang@mail.ioa.ac.cn) |
| 英文摘要 | A high-overtone bulk acoustic resonator (hbar) consisting of a piezoelectric film with two electrodes on a substrate exhibits a high quality factor (q) and multi-mode resonance spectrum. by analyzing the influences of each layer's material and structure (thickness) parameters on the effective electromechanical coupling coefficient (k-eff(2)), the resonance spectrum characteristics of k-eff(2) have been investigated systematically, and the optimal design of hbar has been provided. besides, a device, corresponding to one of the theoretical cases studied, is fabricated and evaluated. the experimental results are basically consistent with the theoretical results. finally, the effects of k-eff(2) on the function of the crystal oscillators constructed with hbars are proposed. the crystal oscillators can operate in more modes and have a larger frequency hopping bandwidth by using the hbars with a larger k(eff)(2 |
| WOS关键词 | LOW PHASE NOISE ; COMPOSITE RESONATORS ; PIEZOELECTRIC FILMS ; FREQUENCY-SPECTRA ; ZNO FILMS ; HBAR |
| WOS研究方向 | Science & Technology - Other Topics ; Instruments & Instrumentation |
| WOS类目 | Nanoscience & Nanotechnology ; Instruments & Instrumentation |
| 语种 | 英语 |
| WOS记录号 | WOS:000385483000014 |
| 出版者 | MDPI AG |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2374793 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Liu, Mengwei; Wang, Chenghao |
| 作者单位 | 1.Chinese Acad Sci, Inst Acoust, Beijing 100190, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li, Jian,Liu, Mengwei,Wang, Chenghao. Resonance spectrum characteristics of effective electromechanical coupling coefficient of high-overtone bulk acoustic resonator[J]. Micromachines,2016,7(9):11. |
| APA | Li, Jian,Liu, Mengwei,&Wang, Chenghao.(2016).Resonance spectrum characteristics of effective electromechanical coupling coefficient of high-overtone bulk acoustic resonator.Micromachines,7(9),11. |
| MLA | Li, Jian,et al."Resonance spectrum characteristics of effective electromechanical coupling coefficient of high-overtone bulk acoustic resonator".Micromachines 7.9(2016):11. |
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来源：中国科学院大学
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