Simulation of plastic deformation of sculptured diaphragm silicon microstructure
文献类型：期刊论文
| 作者 | Jiang, Wanli1,2; Xu, Dehui1; Yao, Shaokang1,2; Xiong, Bin1; Wang, Yuelin1 |
| 刊名 | Microelectronic engineering
 |
| 出版日期 | 2016-02-20 |
| 卷号 | 152页码:26-34 |
| 关键词 | Plastic deformation Microstructure yield criterion Iterative finite element simulation |
| ISSN号 | 0167-9317 |
| DOI | 10.1016/j.mee.2015.12.011 |
| 通讯作者 | Xu, dehui(dehuixu@mail.sim.ac.cn) |
| 英文摘要 | Single crystal silicon mems microstructures could be plastically deformed during high-temperature manufacturing process. in this paper, an iterative finite element simulation method based on von mises yield criterion is proposed to determine the plastic deformation of silicon microstructure. in the proposed method, the critical condition for plastic deformation is that the maximum von mises stress of the microstructure equals to the yield stress. sculptured diaphragm microstructures with different dimensions are designed to verify the method. plastic deformation of the structure is measured after the annealing process of 1100 degrees c. the simulation value fits the experiment well and the average deviation between the simulation data and experimental data is 2.2%. (c) 2015 elsevier b.v. all rights reserved. |
| WOS关键词 | DISLOCATION DYNAMICS ; SEMICONDUCTORS ; BRITTLE ; CRYSTALS ; BEHAVIOR ; MODEL |
| WOS研究方向 | Engineering ; Science & Technology - Other Topics ; Optics ; Physics |
| WOS类目 | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000385991400005 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2374852 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Xu, Dehui |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, Shanghai, Peoples R China 2.Grad Univ Chinese Acad Sci, CAS, Beijing, Peoples R China |
| 推荐引用方式 GB/T 7714 | Jiang, Wanli,Xu, Dehui,Yao, Shaokang,et al. Simulation of plastic deformation of sculptured diaphragm silicon microstructure[J]. Microelectronic engineering,2016,152:26-34. |
| APA | Jiang, Wanli,Xu, Dehui,Yao, Shaokang,Xiong, Bin,&Wang, Yuelin.(2016).Simulation of plastic deformation of sculptured diaphragm silicon microstructure.Microelectronic engineering,152,26-34. |
| MLA | Jiang, Wanli,et al."Simulation of plastic deformation of sculptured diaphragm silicon microstructure".Microelectronic engineering 152(2016):26-34. |
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来源：中国科学院大学
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