Structural, electrical and optical properties of highly crystalline indium tin oxide films fabricated by rpd at room temperature
文献类型：期刊论文
| 作者 | Shi, Jianhua1,2; Shen, Leilei1,2; Meng, Fanying1; Liu, Zhengxin1 |
| 刊名 | Materials letters
 |
| 出版日期 | 2016-11-01 |
| 卷号 | 182页码:32-35 |
| 关键词 | Highly crystalline Ito thin film Rpd Room temperature |
| ISSN号 | 0167-577X |
| DOI | 10.1016/j.matlet.2016.06.084 |
| 通讯作者 | Meng, fanying(fymeng@mail.sim.ac.cn) |
| 英文摘要 | Highly crystalline indium tin oxide (ito) films were fabricated by reactive plasma deposition (rpd) technique at room temperature. the effects of oxygen partial pressure on structural, optical and electrical properties of the ito film were investigated. an interesting growth mode transition from 3 dimensions (3d) to 2 dimensions (2d) was observed. it was found that this transition in growth mode was accompanied by a phase change from amorphous to crystalline. in addition, the obtained ito film showed a metal-semiconductor transition property with various transition temperatures from 90 k to 175 k. by optimizing oxygen partial pressure value, film with low resistivity of 2.3 x 10(-4) omega cm, carrier mobility high up to 35 cm(2)/v s and average optical transmittance over 90% was developed at room temperature. (c) 2016 elsevier b.v. all rights reserved. |
| WOS关键词 | THIN-FILMS |
| WOS研究方向 | Materials Science ; Physics |
| WOS类目 | Materials Science, Multidisciplinary ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000382338400008 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2375418 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Meng, Fanying |
| 作者单位 | 1.Chinese Acad Sci, SIMIT, Res Ctr New Energy Technol, Shanghai 201800, Peoples R China 2.UCAS, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Shi, Jianhua,Shen, Leilei,Meng, Fanying,et al. Structural, electrical and optical properties of highly crystalline indium tin oxide films fabricated by rpd at room temperature[J]. Materials letters,2016,182:32-35. |
| APA | Shi, Jianhua,Shen, Leilei,Meng, Fanying,&Liu, Zhengxin.(2016).Structural, electrical and optical properties of highly crystalline indium tin oxide films fabricated by rpd at room temperature.Materials letters,182,32-35. |
| MLA | Shi, Jianhua,et al."Structural, electrical and optical properties of highly crystalline indium tin oxide films fabricated by rpd at room temperature".Materials letters 182(2016):32-35. |
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来源：中国科学院大学
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