Formation Of Dendritic Nanostructures In Pyrex Glass Anodically Bonded To Silicon Coated With An Aluminum Thin Film
文献类型：期刊论文
| 作者 | Hu YQ(胡宇泉) ; Zhao YP(赵亚溥); Yu TX(余同希)
|
| 刊名 | Materials Science And Engineering A-Structural Materials Properties Microstructure And Processing
 |
| 出版日期 | 2008 |
| 页码 | 611-616 |
| 通讯作者邮箱 | yzhao@lnm.imech.ac.cn |
| 关键词 | Anodic Bonding Dendritic Nanostructures Aluminum Thin Film Depletion Layer Mems Ion Drift Processes Borosilicate Glass Depletion |
| ISSN号 | 0921-5093 |
| 通讯作者 | Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China. |
| 中文摘要 | Anodic bonding with thin films of metal or alloy as an intermediate layer, finds increasing applications in micro/nanoelectromechanical systems. At the bonding temperature of 350 degrees C, voltage of 400 V, and 30 min duration, the anodic bonding is completed between Pyrex glass and crystalline silicon coated with an aluminum thin film with a thickness comprised between 50 and 230 nm. Sodium-depleted layers and dendritic nanostructures were observed in Pyrex 7740 glass adjacent to the bonding interface. The sodium depletion width does not increase remarkably with the thickness of aluminum film. The dendritic nanostructures result from aluminum diffusion into the Pyrex glass. This experimental research is expected to enhance the understanding of how the depletion layer and dendritic nanostructures affect the quality of anodic bonding. (C) 2007 Elsevier B.V. All rights reserved. |
| 类目[WOS] | Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering |
| 研究领域[WOS] | Science & Technology - Other Topics ; Materials Science ; Metallurgy & Metallurgical Engineering |
| 关键词[WOS] | ION DRIFT PROCESSES ; BOROSILICATE GLASS ; DEPLETION |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000256071100154 |
| 公开日期 | 2009-08-03 ; 2009-09-14 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/25564]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Hu YQ,Zhao YP,Yu TX. Formation Of Dendritic Nanostructures In Pyrex Glass Anodically Bonded To Silicon Coated With An Aluminum Thin Film[J]. Materials Science And Engineering A-Structural Materials Properties Microstructure And Processing,2008:611-616. |
| APA | 胡宇泉,赵亚溥,&余同希.(2008).Formation Of Dendritic Nanostructures In Pyrex Glass Anodically Bonded To Silicon Coated With An Aluminum Thin Film.Materials Science And Engineering A-Structural Materials Properties Microstructure And Processing,611-616. |
| MLA | 胡宇泉,et al."Formation Of Dendritic Nanostructures In Pyrex Glass Anodically Bonded To Silicon Coated With An Aluminum Thin Film".Materials Science And Engineering A-Structural Materials Properties Microstructure And Processing (2008):611-616. |
入库方式： OAI收割
来源：力学研究所
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