中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Structural, optical and electrical properties of zno films grown by pulsed laser deposition (pld)

文献类型:期刊论文

作者Zhao, JL; Li, XM; Bian, JM; Yu, WD; Gao, XD
刊名Journal of crystal growth
出版日期2005-04-01
卷号276期号:3-4页码:507-512
关键词Crystal structure Pulsed laser deposition Zno film Optical and electrical properties
ISSN号0022-0248
DOI10.1016/j.jcrysgro.2004.11.407
通讯作者Li, xm(lixm@mail.sci.ac.cn)
英文摘要Zno thin films were grown on single-crystal si(1 0 0) and quartz glass substrates by pulsed laser deposition (pld) technique using a krf excimer laser with wavelength of 248 nm. the structural, optical and electrical properties of the as-grown films were investigated using x-ray diffraction (xrd), atomic force microscopy (afm), field emission scanning electronic microscopy (fe-sem), transmittance spectrometry, and hall-effect measurement. the films show c-axis oriented hexagonal wurtize crystal structure even at low substrate temperature of 200 degrees c. with the increase of substrate temperature and oxygen pressure, the crystallinity is enhanced and the film presents smooth, dense and uniformed microstructure, and strong interface bonding with substrate. the films grown at higher substrate temperature and oxygen pressure exhibit high average transmittance about 90% in the visible region and very sharp absorption edge at 378 nm. the energy band gap calculated from the transmittance spectra is about 3.25 similar to 3.27 ev. hall measurement indicates that the resistivity of films increases with substrate temperature and oxygen pressure. (c) 2004 elsevier b.v. all rights reserved.
WOS关键词THIN-FILMS ; ZINC-OXIDE ; SPRAY-PYROLYSIS
WOS研究方向Crystallography ; Materials Science ; Physics
WOS类目Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied
语种英语
WOS记录号WOS:000228385300026
出版者ELSEVIER SCIENCE BV
URI标识http://www.irgrid.ac.cn/handle/1471x/2377548
专题中国科学院大学
通讯作者Li, XM
作者单位1.Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China
2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式
GB/T 7714
Zhao, JL,Li, XM,Bian, JM,et al. Structural, optical and electrical properties of zno films grown by pulsed laser deposition (pld)[J]. Journal of crystal growth,2005,276(3-4):507-512.
APA Zhao, JL,Li, XM,Bian, JM,Yu, WD,&Gao, XD.(2005).Structural, optical and electrical properties of zno films grown by pulsed laser deposition (pld).Journal of crystal growth,276(3-4),507-512.
MLA Zhao, JL,et al."Structural, optical and electrical properties of zno films grown by pulsed laser deposition (pld)".Journal of crystal growth 276.3-4(2005):507-512.

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来源:中国科学院大学

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