Influences of the period of repeating thickness on the stress of alternative high and low refractivity zro2/sio2 multilayers
文献类型：期刊论文
| 作者 | Shao, SY; Fan, ZX; Shao, JD |
| 刊名 | Acta physica sinica
 |
| 出版日期 | 2005-07-01 |
| 卷号 | 54期号:7页码:3312-3316 |
| 关键词 | Zro2/sio2 multilayers Residual stress Periods of repeating thickness |
| ISSN号 | 1000-3290 |
| 通讯作者 | Shao, sy(shaoshuying@siom.ac.cn) |
| 英文摘要 | The effect of period of repeating thickness on the stress is studied in zro2/sio2 multilayers deposited by electron beam evaporation on bk7 glass and fused silica substrates, separately. the results show that the residual stress in the multilayers is compressive, and with the increase of the period of repeating thickness the residual stress in multilayers decrease in both bk7 and fused silica substrates. at the same time, the residual stress in multilayers deposited on bk7 glass substrates is less than that in the samples deposited on fused silica substrates. the variation of the microstructure examined by the x-ray diffraction shows that the microscopic deformation does not correspond to the macroscopic stress, which may be due to the variation of the interface stress. |
| WOS关键词 | INTERFACE STRESS ; THIN-FILMS |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Multidisciplinary |
| 语种 | 英语 |
| WOS记录号 | WOS:000230231700059 |
| 出版者 | CHINESE PHYSICAL SOC |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2377763 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Shao, SY |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Res & Dev Ctr Opt Thin Film Coatings, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100864, Peoples R China |
| 推荐引用方式 GB/T 7714 | Shao, SY,Fan, ZX,Shao, JD. Influences of the period of repeating thickness on the stress of alternative high and low refractivity zro2/sio2 multilayers[J]. Acta physica sinica,2005,54(7):3312-3316. |
| APA | Shao, SY,Fan, ZX,&Shao, JD.(2005).Influences of the period of repeating thickness on the stress of alternative high and low refractivity zro2/sio2 multilayers.Acta physica sinica,54(7),3312-3316. |
| MLA | Shao, SY,et al."Influences of the period of repeating thickness on the stress of alternative high and low refractivity zro2/sio2 multilayers".Acta physica sinica 54.7(2005):3312-3316. |
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来源：中国科学院大学
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