中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Theoretical study of influence of substrate microdefects on optical properties of dielectric thin films

文献类型:期刊论文

作者Shen, J; Liu, SH; Shen, ZC; Kong, WJ; Huang, JB; Shao, JD; Fan, ZX
刊名Acta physica sinica
出版日期2005-10-01
卷号54期号:10页码:4920-4925
关键词Microdefect Optical thin film Inhomogeneous coating Optical property
ISSN号1000-3290
通讯作者Shen, j(shj@siom.ac.cn)
英文摘要Based on the theory of inhomogeneous thin films, a model for refractive index of stratified dielectric substrate is firstly put forward. the substrate can be divided into surface layer, subsurface layer and bulk layer in turn. both the surface layer and subsurface layer, whose refractive indices obey statistical distributions, are equivalent to inhomogeneous thin films. they can be separated into n-1 and n-2 sublayers respetively which are regarded as homogenous thin films. subsequently, theoretical analysis was carried out utilizing the characteristic matrix method of optical thin films. numerical calculation for optical properties of single layer dielectric thin films was carried out. the computing results indicate that microdefects in surface layer and subsurface layer of the substrate alter the equivalent refractive indices of the thin film and the substrate, which leads to the deviation of pseudo-brewster angles and assembling reflectance from ideal conditions. meanwhile, these microdefects change the propagation characteristics in thin film and substrate, as a result the phase shift of reflection and phase difference deviate from ideal conditions. in addition, this model is also suitable for calculating the influence of microdefects in the substrate on optical propertied of multilayer dielectric thin films.
WOS关键词DAMAGE
WOS研究方向Physics
WOS类目Physics, Multidisciplinary
语种英语
WOS记录号WOS:000232443100080
出版者CHINESE PHYSICAL SOC
URI标识http://www.irgrid.ac.cn/handle/1471x/2378339
专题中国科学院大学
通讯作者Shen, J
作者单位1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China
2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
3.Shaanxi Univ Sci & Technol, Sch Mat Sci & Engn, Xianyang 712081, Peoples R China
推荐引用方式
GB/T 7714
Shen, J,Liu, SH,Shen, ZC,et al. Theoretical study of influence of substrate microdefects on optical properties of dielectric thin films[J]. Acta physica sinica,2005,54(10):4920-4925.
APA Shen, J.,Liu, SH.,Shen, ZC.,Kong, WJ.,Huang, JB.,...&Fan, ZX.(2005).Theoretical study of influence of substrate microdefects on optical properties of dielectric thin films.Acta physica sinica,54(10),4920-4925.
MLA Shen, J,et al."Theoretical study of influence of substrate microdefects on optical properties of dielectric thin films".Acta physica sinica 54.10(2005):4920-4925.

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来源:中国科学院大学

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