中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Growth mechanism for n-doped zno films grown by spray pyrolysis method

文献类型:期刊论文

作者Zhao, JL; Li, XM; Bian, JM; Zhang, CY; Yu, WD; Gao, XD
刊名Journal of inorganic materials
出版日期2005-07-01
卷号20期号:4页码:959-964
关键词P-type zno film Spray pyrolysis Dope Growth mechanism
ISSN号1000-324X
通讯作者Zhao, jl(jlzhao@mail.sic.ac.cn)
英文摘要N-doped zno films were grown at si(100) substrates by ultrasonic spray pyrolysis with the precursor of zinc acetate and ammonium acetate. thermal-mass spectrometric analysis (tg-dsc-ms), x-ray diffraction (xrd), and field emission scanning electron microscope (fesem) were employed to analyze the growth mechanism, crystal structure and electrical properties of films. results show that the films grown at different substrate temperatures show different growth mechanisms, which could influence crystal structure and electrical properties of films. the successful p-type doping can be realized at an optimized substrate temperature. the p-type zno film shows excellent electrical properties such as a hole concentration of 3.70 x 10(11)cm(-3), hole mobility of 110cm(2) v-.(-1) s(-1) and resistivity of 1.4 x 10(-2) omega(.)cm.
WOS关键词P-TYPE ZNO ; NITROGEN ACCEPTORS ; CODOPING METHOD ; DEPOSITION
WOS研究方向Materials Science
WOS类目Materials Science, Ceramics
语种英语
WOS记录号WOS:000230632200031
出版者SCIENCE PRESS
URI标识http://www.irgrid.ac.cn/handle/1471x/2378360
专题中国科学院大学
通讯作者Zhao, JL
作者单位1.Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China
2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式
GB/T 7714
Zhao, JL,Li, XM,Bian, JM,et al. Growth mechanism for n-doped zno films grown by spray pyrolysis method[J]. Journal of inorganic materials,2005,20(4):959-964.
APA Zhao, JL,Li, XM,Bian, JM,Zhang, CY,Yu, WD,&Gao, XD.(2005).Growth mechanism for n-doped zno films grown by spray pyrolysis method.Journal of inorganic materials,20(4),959-964.
MLA Zhao, JL,et al."Growth mechanism for n-doped zno films grown by spray pyrolysis method".Journal of inorganic materials 20.4(2005):959-964.

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来源:中国科学院大学

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