Study on lidt of mdgs for different fabrication processes
文献类型：期刊论文
| 作者 | Kong, WJ; Liu, SJ; Shen, J; Shen, ZC; Shao, JD; Fan, ZX; Yao, J |
| 刊名 | Microelectronic engineering
 |
| 出版日期 | 2006-04-01 |
| 卷号 | 83期号:4-9页码:1426-1429 |
| 关键词 | Laser-induced damage threshold Multi-layer dielectric gratings Scanning electron microscope Damage morphology |
| ISSN号 | 0167-9317 |
| DOI | 10.1016/j.mee.2006.01.200 |
| 通讯作者 | Kong, wj(kwjsd@163.com) |
| 英文摘要 | Progress of ultra-short high peak power laser depends significantly on laser-induced damage threshold (lidt) of diffraction grating used in chirped-pulse amplification system. laser-induced damage experiment was conducted by the standard one-on-one modes and the damage morphology was detected under scanning electron microscope. lidt of the samples, which are masked on hafnia and on chrome, are 3.15 and 4.14 j/cm(2) respectively. damage process corresponding to the two kinds of samples is described in detail by analyzing the relative damage morphology. the explanation of the difference between the two kinds of samples is given with the analysis of the pollution, which was introduced during the manufacturing process. (c) 2006 elsevier b.v. all rights reserved. |
| WOS关键词 | HIGH-EFFICIENCY ; REFLECTION GRATINGS |
| WOS研究方向 | Engineering ; Science & Technology - Other Topics ; Optics ; Physics |
| WOS类目 | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000237581900195 |
| 出版者 | ELSEVIER SCIENCE BV |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2378515 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Kong, WJ |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China 3.Univ Durham, Dept Phys, CFAI, Durham TS1 3FB, England |
| 推荐引用方式 GB/T 7714 | Kong, WJ,Liu, SJ,Shen, J,et al. Study on lidt of mdgs for different fabrication processes[J]. Microelectronic engineering,2006,83(4-9):1426-1429. |
| APA | Kong, WJ.,Liu, SJ.,Shen, J.,Shen, ZC.,Shao, JD.,...&Yao, J.(2006).Study on lidt of mdgs for different fabrication processes.Microelectronic engineering,83(4-9),1426-1429. |
| MLA | Kong, WJ,et al."Study on lidt of mdgs for different fabrication processes".Microelectronic engineering 83.4-9(2006):1426-1429. |
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来源：中国科学院大学
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