Growth of high quality zno films by pulsed laser deposition and its photoresponsivity characteristics
文献类型：期刊论文
| 作者 | Bian, JM; Li, XM; Zhao, JL; Yu, WD |
| 刊名 | Journal of inorganic materials
 |
| 出版日期 | 2006-05-01 |
| 卷号 | 21期号:3页码:701-706 |
| 关键词 | Zno film Pulsed laser deposition (pld) Photoconductive uv detector Photoresponsivity mechanism |
| ISSN号 | 1000-324X |
| 通讯作者 | Bian, jm(jmbian@mail.sic.ac.cn) |
| 英文摘要 | Highly c-axis oriented zno thin films were grown on si (100) substrate by pulsed laser deposition (pld) technique. x-ray diffraction (xrd) and field emission scanning electron microscopy (fesem) were employed to analyze the crystalline and microscopic structure of the films. results show that with the increase of substrate temperature and oxygen pressure, the crystallinity is enhanced and the film presents smooth, dense and uniformed microstructure, and strong interface bonding with substrate under optimal conditions. the photoconductive uv detectors based on zno films with interdigital (idt) configuration were fabricated by the lift-off photo-etching method. the i-v characteristics of the detectors before and after ultraviolet illumination were also investigated, indicating a good ohmic behavior between electrodes and zno films, and significant photoresponsivity was observed under uv illumination. |
| WOS关键词 | ELECTRICAL-PROPERTIES ; DETECTORS |
| WOS研究方向 | Materials Science |
| WOS类目 | Materials Science, Ceramics |
| 语种 | 英语 |
| WOS记录号 | WOS:000237785500030 |
| 出版者 | SCIENCE CHINA PRESS |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2378688 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Bian, JM |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Bian, JM,Li, XM,Zhao, JL,et al. Growth of high quality zno films by pulsed laser deposition and its photoresponsivity characteristics[J]. Journal of inorganic materials,2006,21(3):701-706. |
| APA | Bian, JM,Li, XM,Zhao, JL,&Yu, WD.(2006).Growth of high quality zno films by pulsed laser deposition and its photoresponsivity characteristics.Journal of inorganic materials,21(3),701-706. |
| MLA | Bian, JM,et al."Growth of high quality zno films by pulsed laser deposition and its photoresponsivity characteristics".Journal of inorganic materials 21.3(2006):701-706. |
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来源：中国科学院大学
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