Roughness and light scattering properties of zro2 thin films deposited by electron beam evaporation
文献类型:期刊论文
作者 | Hou, HH; Sun, XL; Shen, YM; Shao, JD; Fan, ZX; Yi, K |
刊名 | Acta physica sinica
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出版日期 | 2006-06-01 |
卷号 | 55期号:6页码:3124-3127 |
关键词 | Zio(2) coatings Surface roughness Scalar scattering Electron beam evaporation |
ISSN号 | 1000-3290 |
通讯作者 | Hou, hh(haihonghou@siom.ac.cn) |
英文摘要 | Zirconium oxide ( zro2) coatings for 632.8nm center wavelength were deposited on the ag layer by electron beam evaporation, optical thickness of which varied in the range of 80-480nm. surface roughness and scattering characteristics of zro2 coatings with different thickness were investigated. it was found that with the gradually increase of the thickness, both roughness and total integrated scattering (tis) of the samples decreased firstly and then increased. these results indicated that tis of the samples mainly depended on the surface roughness. according to the uncorrelated surface roughness scattering model, scattering properties of the samples were analyzed theoretically. the calculated tis values based on this model agreed well with that obtained by tis measurements. |
WOS关键词 | MIRRORS |
WOS研究方向 | Physics |
WOS类目 | Physics, Multidisciplinary |
语种 | 英语 |
WOS记录号 | WOS:000238168500081 |
出版者 | CHINESE PHYSICAL SOC |
URI标识 | http://www.irgrid.ac.cn/handle/1471x/2378867 |
专题 | 中国科学院大学 |
通讯作者 | Hou, HH |
作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
推荐引用方式 GB/T 7714 | Hou, HH,Sun, XL,Shen, YM,et al. Roughness and light scattering properties of zro2 thin films deposited by electron beam evaporation[J]. Acta physica sinica,2006,55(6):3124-3127. |
APA | Hou, HH,Sun, XL,Shen, YM,Shao, JD,Fan, ZX,&Yi, K.(2006).Roughness and light scattering properties of zro2 thin films deposited by electron beam evaporation.Acta physica sinica,55(6),3124-3127. |
MLA | Hou, HH,et al."Roughness and light scattering properties of zro2 thin films deposited by electron beam evaporation".Acta physica sinica 55.6(2006):3124-3127. |
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来源:中国科学院大学
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