Piezoelectricity Of Zno Films Prepared By Sol-Gel Method
文献类型：期刊论文
| 作者 | Zhang KM; Zhao YP(赵亚溥) ; He FQ(何发泉); Liu DQ
|
| 刊名 | Chinese Journal of Chemical Physics
 |
| 出版日期 | 2007 |
| 页码 | 721-726 |
| 通讯作者邮箱 | yzhao@imech.ac.cn |
| 关键词 | Zno Thin Films Piezoelectric Coefficient Piezo-Response Force Microscope Sol-Gel Surface Roughness Resistivity |
| ISSN号 | 1003-7713 |
| 通讯作者 | Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China. |
| 中文摘要 | ZnO piezoelectric thin films were prepared on crystal substrate Si(111) by sol-gel technology, then characterized by scanning electron microscopy, X-ray diffraction and atomic force microscopy (AFM). The ZnO films characterized by X-ray diffraction are highly oriented in (002) direction with the growing of the film thickness. The morphologies, roughness and grain size of ZnO film investigated by AFM show that roughness and grain size of ZnO piezoelectric films decrease with the increase of the film thickness. The roughness dimension is 2.188-0.914 nm. The piezoelectric coefficient d(33) was investigated with a piezo-response force microscope (PFM). The results show that the piezoelectric coefficient increases with the increase of thickness and (002) orientation. When the force reference is close to surface roughness of the films, the piezoelectric coefficient measured is inaccurate and fluctuates in a large range, but when the force reference is big, the piezoelectric coefficient d(33) changes little and ultimately keeps constant at a low frequency. |
| 类目[WOS] | Physics, Atomic, Molecular & Chemical |
| 研究领域[WOS] | Physics |
| 关键词[WOS] | RESISTIVITY |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000252031900021 |
| 公开日期 | 2009-08-03 ; 2009-09-14 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/25570]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Zhang KM,Zhao YP,He FQ,et al. Piezoelectricity Of Zno Films Prepared By Sol-Gel Method[J]. Chinese Journal of Chemical Physics,2007:721-726. |
| APA | Zhang KM,赵亚溥,何发泉,&Liu DQ.(2007).Piezoelectricity Of Zno Films Prepared By Sol-Gel Method.Chinese Journal of Chemical Physics,721-726. |
| MLA | Zhang KM,et al."Piezoelectricity Of Zno Films Prepared By Sol-Gel Method".Chinese Journal of Chemical Physics (2007):721-726. |
入库方式： OAI收割
来源：力学研究所
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