Surface modification of single crystal silicon by ar+ ion implantation and vacuum deposition of amorphous carbon coating
文献类型：期刊论文
| 作者 | Sun, R; Xu, T; Xue, QJ |
| 刊名 | Surface & coatings technology
 |
| 出版日期 | 2006-05-22 |
| 卷号 | 200期号:20-21页码:5794-5799 |
| 关键词 | Ion implantation Silicon Tribology Adhesion Amorphous carbon coating Microstructure |
| ISSN号 | 0257-8972 |
| DOI | 10.1016/j.surfcoat.2005.08.125 |
| 通讯作者 | Xue, qj() |
| 英文摘要 | Single crystal silicon wafers (si (100)) were implanted with 110 kev ar+ ions at a fluence of 1 x10(16) ions/cm(2). then the unimplanted and ion-implanted si surfaces were coated with an amorphous carbon coating of 50 +/- 5 nm thick making use of vacuum vapor deposition. the microstructures of the unimplanted and ar+ ion implanted si wafers were analysed by means of transmission electron microscopy (tem). the hardness and elastic modulus of the unimplanted and ar+ ion implanted si wafers were measured using a nano-indentation device. the adhesion strengths of the amorphous carbon coatings on the unimplanted and ar+ ion implanted si surfaces were determined making use of scratch test. the friction and wear behaviors of the samples were evaluated using a ball-on-disk reciprocating friction and wear tester. the morphologies of the wear and scratch tracks of the si samples were observed using a scanning electron microscope (sem). it was found that ar+ ion implantation alone led to little effect on the friction and wear behavior of the si sample. however, the amorphous carbon coating deposited on the ar+ ion implanted si surface showed much better friction-reducing and antiwear ability than that on the unimplanted si surface. the formation of a mixed nano-crystal and amorphous silicon structure during the ar+ ion implantation improves the ability of the amorphous carbon coating to resist plastic deformation, and hence increase the adhesion strength and antiwear-life of the amorphous carbon film. (c) 2005 elsevier b.v. all rights reserved. |
| WOS关键词 | TRIBOLOGICAL PROPERTIES ; NITRIDE CERAMICS ; NANOINDENTATION ; FRICTION ; SI(100) ; SYSTEM ; WEAR |
| WOS研究方向 | Materials Science ; Physics |
| WOS类目 | Materials Science, Coatings & Films ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000237367600017 |
| 出版者 | ELSEVIER SCIENCE SA |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2379286 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Xue, QJ |
| 作者单位 | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Henan Univ, Lab Special Funct Mat, Kaifeng 475001, Peoples R China 3.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Sun, R,Xu, T,Xue, QJ. Surface modification of single crystal silicon by ar+ ion implantation and vacuum deposition of amorphous carbon coating[J]. Surface & coatings technology,2006,200(20-21):5794-5799. |
| APA | Sun, R,Xu, T,&Xue, QJ.(2006).Surface modification of single crystal silicon by ar+ ion implantation and vacuum deposition of amorphous carbon coating.Surface & coatings technology,200(20-21),5794-5799. |
| MLA | Sun, R,et al."Surface modification of single crystal silicon by ar+ ion implantation and vacuum deposition of amorphous carbon coating".Surface & coatings technology 200.20-21(2006):5794-5799. |
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来源：中国科学院大学
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