Design and testing of a micromechanical resonant electrostatic field sensor
文献类型：期刊论文
| 作者 | Peng, CR; Chen, XX; Ye, C; Tao, H; Cui, GP; Bai, Q; Chen, SF; Xia, SH |
| 刊名 | Journal of micromechanics and microengineering
 |
| 出版日期 | 2006-05-01 |
| 卷号 | 16期号:5页码:914-919 |
| ISSN号 | 0960-1317 |
| DOI | 10.1088/0960-1317/16/5/006 |
| 通讯作者 | Peng, cr(chunrong_p@163.com) |
| 英文摘要 | The design, fabrication and characterization testing of a high-performance micromechanical resonant electrostatic field sensor at low driving voltages is presented. structures including sensing electrodes, shielding electrodes and suspension beam design are discussed. the electromechanical behavior around the resonant frequency is described by an equivalent electric circuit to predict the output characterization of the sensors. the device is fabricated by a surface micromachining process. with low driving voltages compared with other reported devices, the electrostatic field sensors (efs) have a resolution of 200 v m(-1), the best reported figure for a mems-based device used in ambient air at room temperature. a nonlinearity of 1.8% (end-point-straight-line) in a measurement range of 0-10 kv m(-1) is achieved. we have also achieved an uncertainty of 4.62% for the measurement data. |
| WOS研究方向 | Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Materials Science ; Mechanics |
| WOS类目 | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Materials Science, Multidisciplinary ; Mechanics |
| 语种 | 英语 |
| WOS记录号 | WOS:000238124300007 |
| 出版者 | IOP PUBLISHING LTD |
| URI标识 | http://www.irgrid.ac.cn/handle/1471x/2379294 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Peng, CR |
| 作者单位 | 1.Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Peng, CR,Chen, XX,Ye, C,et al. Design and testing of a micromechanical resonant electrostatic field sensor[J]. Journal of micromechanics and microengineering,2006,16(5):914-919. |
| APA | Peng, CR.,Chen, XX.,Ye, C.,Tao, H.,Cui, GP.,...&Xia, SH.(2006).Design and testing of a micromechanical resonant electrostatic field sensor.Journal of micromechanics and microengineering,16(5),914-919. |
| MLA | Peng, CR,et al."Design and testing of a micromechanical resonant electrostatic field sensor".Journal of micromechanics and microengineering 16.5(2006):914-919. |
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来源：中国科学院大学
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